Patents by Inventor Kersten Kehr
Kersten Kehr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9689676Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: GrantFiled: June 12, 2015Date of Patent: June 27, 2017Assignee: ROBERT BOSCH GMBHInventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Patent number: 9593948Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: GrantFiled: July 17, 2014Date of Patent: March 14, 2017Assignee: ROBERT BOSCH GMBHInventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Patent number: 9593949Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: GrantFiled: December 30, 2015Date of Patent: March 14, 2017Assignee: ROBERT BOSCH GMBHInventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Publication number: 20160109236Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: ApplicationFiled: December 30, 2015Publication date: April 21, 2016Inventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Patent number: 9261363Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.Type: GrantFiled: June 6, 2007Date of Patent: February 16, 2016Assignee: ROBERT BOSCH GMBHInventors: Reinhard Neul, Johannes Classen, Axel Franke, Marco Quander, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Publication number: 20150276408Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: ApplicationFiled: June 12, 2015Publication date: October 1, 2015Inventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Patent number: 9081027Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: GrantFiled: October 2, 2008Date of Patent: July 14, 2015Assignee: ROBERT BOSCH GMBHInventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Publication number: 20140326070Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: ApplicationFiled: July 17, 2014Publication date: November 6, 2014Applicant: ROBERT BOSCH GMBHInventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Patent number: 8429971Abstract: A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.Type: GrantFiled: November 14, 2007Date of Patent: April 30, 2013Assignee: Robert Bosch GmbHInventors: Johannes Classen, Axel Franke, Dietrich Schubert, Kersten Kehr, Ralf Reichenbach
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Publication number: 20120060604Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.Type: ApplicationFiled: October 2, 2008Publication date: March 15, 2012Inventors: Reinhard Neul, Johannes Classen, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Daniel Christoph Meisel, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr
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Publication number: 20110174076Abstract: A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.Type: ApplicationFiled: November 14, 2007Publication date: July 21, 2011Inventors: Johannes Classen, Axel Franke, Dietrich Schubert, Kersten Kehr, Ralf Reichenbach
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Publication number: 20110088469Abstract: A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation.Type: ApplicationFiled: November 8, 2007Publication date: April 21, 2011Inventors: Reinhard Neul, Johannes Classen, Sebastian Gracki, Burkhard Kuhlmann, Axel Franke, Oliver Kohn, Kersten Kehr, Christian Gerhardt
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Publication number: 20100000321Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.Type: ApplicationFiled: June 6, 2007Publication date: January 7, 2010Inventors: Reinhard Neul, Johannes Classen, Axel Franke, Marco Quander, Udo-Martin Gomez, Kersten Kehr
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Publication number: 20080093690Abstract: A micromechanical component and a method for manufacturing such a component, the component having a micromechanical structure and an integrated circuit, the micromechanical structure being monolithically integrated into the circuit, the circuit being provided in a circuit area of the substrate, and the micromechanical structure being provided in a sensor area of the substrate, the material of the substrate being provided in the area of a sacrificial layer as well as in the area of a function layer without a transition.Type: ApplicationFiled: October 10, 2007Publication date: April 24, 2008Inventors: Frank Reichenbach, Franz Laermer, Kersten Kehr, Axel Franke, Andreas Scheurle
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Publication number: 20070234803Abstract: The yaw rate sensor of the present invention has force-conveying means. The central idea of the invention is that the force action conveyed by this arrangement has a frequency such that the frequency of the conveyed force action is an integral multiple of the frequency of the oscillation of the drive element parallel to the X-axis.Type: ApplicationFiled: August 13, 2004Publication date: October 11, 2007Inventors: Udo-Martin Gomez, Reinhard Neul, Kersten Kehr, Marko Rocznik
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Patent number: 7229694Abstract: A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.Type: GrantFiled: May 27, 2003Date of Patent: June 12, 2007Assignee: Robert Bosch GmbHInventors: Lutz Mueller, Kersten Kehr, Markus Ulm
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Patent number: 7057248Abstract: A semiconductor component, in particular a micromechanical pressure sensor based on silicon, having a base layer, an at least largely self-supporting diaphragm and an overlayer situated on the diaphragm, the diaphragm and the base layer, at least from place to place, delimiting a void. Furthermore, at least from place to place, above the diaphragm a conducting region is provided in the overlayer which is electrically poorly conductive as compared to the conducting region, to which the surface of the diaphragm that faces the overlayer is able to be electrically contacted.Type: GrantFiled: November 8, 2002Date of Patent: June 6, 2006Assignee: Robert Bosch GmbHInventors: Helmut Sautter, Frank Schatz, Juergen Graf, Hans Artmann, Udo-Martin Gomez, Kersten Kehr
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Publication number: 20040033372Abstract: A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.Type: ApplicationFiled: May 27, 2003Publication date: February 19, 2004Inventors: Lutz Mueller, Kersten Kehr, Markus Ulm
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Publication number: 20030146447Abstract: A semiconductor component, in particular a micromechanical pressure sensor based on silicon, having a base layer, an at least largely self-supporting diaphragm and an overlayer situated on the diaphragm, the diaphragm and the base layer, at least from place to place, delimiting a void. Furthermore, at least from place to place, above the diaphragm a conducting region is provided in the overlayer which is electrically poorly conductive as compared to the conducting region, to which the surface of the diaphragm that faces the overlayer is able to be electrically contacted.Type: ApplicationFiled: November 8, 2002Publication date: August 7, 2003Inventors: Helmut Sautter, Frank Schatz, Juergen Graf, Hans Artmann, Udo-Martin Gomez, Kersten Kehr