Abstract: The invention concerns an arrangement for wafer inspection, having a device (3) for transporting the wafers (S) from a transfer station (5) to at least one inspection station (7, 9). For transportation of the wafers (S), the device (3) comprises a feeder (4), rotatable about a rotation axis (Z), having at least one wafer support (14) whose position is pivotable, with the rotation of the feeder (4), between the transfer station (5) and inspection station (7, 9); and a drive device (18) that is coupled to the feeder (4) and with the activation of which the feeder (4) is caused to rotate through a predefined reference rotation angle.