Abstract: An integrated circuit is provided, which is formed on a semiconductor substrate. The integrated circuit comprises electronic elements and isolation elements, wherein the electronic elements and the isolation elements are arranged at a top surface of the semiconductor substrate. The isolation elements each are arranged between electronic elements and electrically isolate the electronic elements from each other. Furthermore, the isolation elements comprise an upper part and a lower part, wherein the upper part is broader than the lower part.

Abstract: Method for fabricating a trench isolation structure The invention provides a method for fabricating a trench isolation structure, comprising the following steps: forming a mask (3) on a substrate (1); forming at least one trench (2) in the substrate (1) by means of the mask (3); carrying out selective deposition of a first insulation material (5) to at least partially fill the at least one trench (2) in the substrate (1) with the insulation material (5) in the presence of the mask (3); and applying a second insulation material (6) over the entire surface of the structure in order to fill the at least one trench (2) in the substrate (1) at least up to the top side of the mask (3).