Abstract: A power supply apparatus able to control an output current for maintaining plasma in a plasma generator includes: a switching power supply including a rectifier, an inverter, and a phase shifter; a plasma source connected to the switching power supply and generating the plasma in the plasma generator; a resonance network connected between the switching power supply and the plasma source and including a resonance inductor connected to a primary winding in series and a resonance capacitor connected to the plasma source in parallel and connected to the resonance inductor in series; and a control unit controlling the switching power supply in order to phase-shift a voltage and a current provided to the resonance network.

Abstract: A power supply apparatus able to control an output current for maintaining plasma in a plasma generator includes: a switching power supply including a rectifier, an inverter, and a phase shifter; a plasma source connected to the switching power supply and generating the plasma in the plasma generator; a resonance network connected between the switching power supply and the plasma source and including a resonance inductor connected to a primary winding in series and a resonance capacitor connected to the plasma source in parallel and connected to the resonance inductor in series; and a control unit controlling the switching power supply in order to phase-shift a voltage and a current provided to the resonance network.

Abstract: A power supply apparatus having a passive element for plasma ignition in a plasma generator includes: a switching power supply including a rectifier and an inverter; a transformer including a primary winding and a ferrite core around which the primary winding is wound; and a resonance network connected between the switching power supply and the primary winding and including a resonance inductor connected to the primary winding in series and a resonance capacitor connected to the primary winding in parallel and connected to the resonance inductor in series, wherein the resonance network includes the passive element having one end connected to the resonance capacitor in series and the other end connected to a ground, and magnitudes of a voltage and a current of the inverter are adjusted by the passive element.