Patents by Inventor Keven Hung

Keven Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature
    Publication number: 20060037933
    Abstract: A mirror process uses a tungsten passivation layer to prevent metal-spiking induced mirror bridging and improve mirror curvature. A mirror structure is patterned on a first sacrificial layer overlying a substrate. A tungsten passivation layer is then blanket deposited to cover the top and sidewalls of the mirror structure. A second sacrificial layer is formed overlying the tungsten passivation layer. A releasing process with an etchant including XeF2 is performed to remove the second sacrificial layer, the tungsten passivation layer and the first sacrificial layer simultaneously.
    Type: Application
    Filed: August 23, 2004
    Publication date: February 23, 2006
    Inventors: Wei-Ya Wang, Chung-Yuan Cheng, Tzu-Yang Wu, Keven Hung, Fei-Yuh Chen