Patents by Inventor Kevin A. Chamness

Kevin A. Chamness has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Time weighted moving average filter
    Patent number: 7542880
    Abstract: A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: June 2, 2009
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Richard P. Good, Kevin A. Chamness, Uwe Schulze