Patents by Inventor Kevin BAE

Kevin BAE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Layer deposition method and layer deposition apparatus
    Patent number: 11840760
    Abstract: In a layer deposition method, a substrate is loaded into a process chamber. A gas filling tank is charged with a gas to a predetermined charge pressure. The pressure of the gas is elevated to a pressure greater than the predetermined charge pressure. The gas is introduced into the process chamber.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: December 12, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Shin-Jae Kang, Dong-Hoon Han, Do-Hyung Kim, Kyung-Wook Park, Kevin Bae, Sun-Soo Lee, In-Jae Lee, Jeon-Il Lee, Chae-Mook Lim
  • LAYER DEPOSITION METHOD AND LAYER DEPOSITION APPARATUS
    Publication number: 20190301016
    Abstract: In a layer deposition method, a substrate is loaded into a process chamber. A gas filling tank is charged with a gas to a predetermined charge pressure. The pressure of the gas is elevated to a pressure greater than the predetermined charge pressure. The gas is introduced into the process chamber.
    Type: Application
    Filed: December 3, 2018
    Publication date: October 3, 2019
    Inventors: SHIN-JAE KANG, Dong-Hoon HAN, Do-Hyung KIM, Kyung-Wook PARK, Kevin BAE, Sun-Soo LEE, In-Jae LEE, Jeon-II LEE, Chae-Mook LIM