Abstract: A system for minimizing thermal reactor temperature overshoot and stabilization during a boat push. In one embodiment, the setpoint temperatures are reduced to a minimum value. As the temperature in the thermal reactor begins to increase, the setpoint temperatures are ramped back to the original setpoint temperature.

Abstract: A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comprises an interface for receiving metrology data from the metrology tools and a number of variable parameter tables, one for each of the processing tools, collectively associated with a manufacturing process recipe. The supervising station also includes one or more internal models which relate received metrology data to one or more variables for a processing tool, and which can modify variables stored in the variable parameter table to control the process tools using feedback and/or feed-forward control algorithms. Feed-forward control algorithms may, in certain embodiments, be used to adjust process targets for closed loop feedback control.