Patents by Inventor Kevin Heidrich

Kevin Heidrich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate retainer wear detection method and apparatus
    Publication number: 20050037690
    Abstract: An apparatus and method are provided for detecting wear in substrate retainers used for chemical mechanical planarization processes. A substrate retainer is provided that is adapted to enable a sensor to detect when the wear edge of the retainer has worn to a critical wear threshold so that the retainer may be replaced prior to failure.
    Type: Application
    Filed: August 13, 2003
    Publication date: February 17, 2005
    Inventors: Kevin Heidrich, Liam Roberts
  • Forming polysilicon structures
    Publication number: 20040075119
    Abstract: A doped polysilicon structure may be formed without the need to etch doped polysilicon. The patterned polysilicon may be covered, an opening may be formed in the polysilicon covering, and then the polysilicon may be doped through the opening. As a result, awkward etching of doped polysilicon may be avoided in some cases.
    Type: Application
    Filed: October 8, 2002
    Publication date: April 22, 2004
    Inventors: Sanjay Natarajan, Ibrahim Ban, Kevin Heidrich