Abstract: Described herein are devices and methods related to compositionally graded buffers (CGB) and methods and/or systems for producing CGBs. CGBs enable the growth of high quality materials that are lattice mismatched to a substrate. More specifically, the present disclosure relates to methods for making CGBs by hydride vapor phase epitaxy (HVPE). HVPE methods using a single chamber for producing a CGB may result in a transience in the CGB layers as the flows supplying the reactants are switched to produce the next subsequent layer in the CGB. In contrast to this static style of grading, the present disclosure describes a dynamic method for producing CGBs, in which multiple growth chambers are utilized.

Abstract: The present disclosure relates to a method for manufacturing a device, where the device includes, in order, a metamorphic contact layer, a first metamorphic junction, a metamorphic tunnel junction, and a second metamorphic junction. To produce the device, the manufacturing includes, in order, a first depositing of a buffer layer onto a substrate, a second depositing of the metamorphic contact layer, a third depositing of the first metamorphic junction, a fourth depositing of the metamorphic tunnel junction, a fifth depositing of the second metamorphic junction, and the removing of the buffer layer and the substrate.

Abstract: Disclosed herein is the controlled epitaxy of AlxGa1-xAs, AlxIn1-xP, and AlxGayIn1-x-yP by hydride vapor phase epitaxy (HVPE) through use of an external AlCl3 generator.

Abstract: The present disclosure relates to a composition that includes a III-V planar substrate having a surface aligned with and parallel to a reference plane, where the surface includes a plurality of terraces, each terrace includes a first surface positioned between a first boundary and a second boundary, each boundary is substantially parallel to the other boundaries and positioned substantially parallel to the reference plane, and each terrace is separated from an adjacent terrace by a second surface positioned between the second boundary of the terrace and the first boundary of the adjacent terrace.

Abstract: The present disclosure relates to a method for manufacturing a device, where the device includes, in order, a metamorphic contact layer, a first metamorphic junction, a metamorphic tunnel junction, and a second metamorphic junction. To produce the device, the manufacturing includes, in order, a first depositing of a buffer layer onto a substrate, a second depositing of the metamorphic contact layer, a third depositing of the first metamorphic junction, a fourth depositing of the metamorphic tunnel junction, a fifth depositing of the second metamorphic junction, and the removing of the buffer layer and the substrate.

Abstract: The present disclosure relates to a method that includes contacting a surface of a first layer that includes a Group III element and a Group V element with a gas that includes HCl, where the first layer is positioned in thermal contact with a wafer positioned in a chamber of a reactor, and the contacting results in a roughening of the surface.

Abstract: Presented herein are reactors for growing or depositing semiconductor films or devices. The reactors disclosed may be used for the production of materials grown by hydride vapor phase epitaxy (HVPE).

Abstract: Presented herein are reactors for growing or depositing semiconductor films or devices. The reactors disclosed may be used for the production of III-V materials grown by hydride vapor phase epitaxy (HVPE).

Abstract: Disclosed herein are methods and devices that use a low-thermal conductivity inert gas to shield reactant gases and thus enabling a cold wall operation within a hot wall system.

Abstract: Disclosed herein are novel hydride vapor phase epitaxy reactors and methods of use.

Abstract: The present disclosure relates to a method that includes contacting a surface of a first layer that includes a Group III element and a Group V element with a gas that includes HCl, where the first layer is positioned in thermal contact with a wafer positioned in a chamber of a reactor, and the contacting results in a roughening of the surface.

Abstract: Presented herein are reactors for growing or depositing semiconductor films or devices. The reactors disclosed may be used for the production of III-V materials grown by hydride vapor phase epitaxy (HVPE).