Patents by Inventor Kevin M. Brashear

Kevin M. Brashear has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods, systems, and apparatus for mass flow verification based on choked flow
    Patent number: 11519773
    Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: December 6, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
  • Gas-pulsing-based shared precursor distribution system and methods of use
    Patent number: 11520358
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: December 6, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Gas-Pulsing-Based Shared Precursor Distribution System And Methods Of Use
    Publication number: 20220075396
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Application
    Filed: November 8, 2021
    Publication date: March 10, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Gas-pulsing-based shared precursor distribution system and methods of use
    Patent number: 11169547
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Grant
    Filed: April 27, 2019
    Date of Patent: November 9, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Methods, systems, and apparatus for mass flow verification based on choked flow
    Patent number: 10684159
    Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: June 16, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
  • METHODS, SYSTEMS, AND APPARATUS FOR MASS FLOW VERIFICATION BASED ON CHOKED FLOW
    Publication number: 20200166400
    Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.
    Type: Application
    Filed: January 30, 2020
    Publication date: May 28, 2020
    Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
  • Gas-Pulsing-Based Shared Precursor Distribution System and Methods of Use
    Publication number: 20190332129
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Application
    Filed: April 27, 2019
    Publication date: October 31, 2019
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • METHODS, SYSTEMS, AND APPARATUS FOR MASS FLOW VERIFICATION BASED ON CHOKED FLOW
    Publication number: 20170370763
    Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.
    Type: Application
    Filed: June 27, 2016
    Publication date: December 28, 2017
    Inventors: Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada