Abstract: A field effect transistor, comprising: a substrate and a superlattice of stacked conducting channels on the substrate; a source and a drain spaced-apart from each other on the superlattice; alternating castellations and trenches formed in the superlattice between the source and the drain, wherein the castellations have sidewalls that cut-down through the superlattice to form the trenches and edges of the stacked conducting channels that terminate at the sidewalls; a fringe field dielectric that fills lower volumes of the trenches up to a height on the sidewalls that is higher than first edges of first conducting channels among the stacked conducting channels, such that the fringe field dielectric is adjacent to the first edges; and a gate electrode overlaying the fringe field dielectric and the castellations such that the gate electrode is not adjacent to the first edges.