Patents by Inventor Kevin M. Keen

Kevin M. Keen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas delivery system for an ion source
    Patent number: 8003954
    Abstract: An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In one embodiment, the ion source has a first crucible and a second crucible. The first crucible and the second crucible are connected to the manifold assembly. In one instance, the crucibles have tamper-resistant features.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: August 23, 2011
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: John Slocum, Kevin M. Keen, Chris Campbell, Robert Lindberg, Stefan Casey
  • GAS DELIVERY SYSTEM FOR AN ION SOURCE
    Publication number: 20090289197
    Abstract: An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In one embodiment, the ion source has a first crucible and a second crucible. The first crucible and the second crucible are connected to the manifold assembly. In one instance, the crucibles have tamper-resistant features.
    Type: Application
    Filed: December 19, 2008
    Publication date: November 26, 2009
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: John SLOCUM, Kevin M. KEEN, Chris CAMPBELL, Robert LINDBERG, Stefan CASEY