Patents by Inventor Kevin Matthew CRABB

Kevin Matthew CRABB has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
    Patent number: 9748120
    Abstract: An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.
    Type: Grant
    Filed: July 1, 2013
    Date of Patent: August 29, 2017
    Assignee: LAM RESEARCH AG
    Inventors: Kevin Matthew Crabb, Philipp Engesser, Vijay Kumar Badam
  • APPARATUS FOR LIQUID TREATMENT OF DISC-SHAPED ARTICLES AND HEATING SYSTEM FOR USE IN SUCH APPARATUS
    Publication number: 20150001202
    Abstract: An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.
    Type: Application
    Filed: July 1, 2013
    Publication date: January 1, 2015
    Inventors: Kevin Matthew CRABB, Philipp ENGESSER, Vijay Kumar BADAM