Patents by Inventor Kevin McMullen
Kevin McMullen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10458472Abstract: In one aspect, the present disclosure provides a sliding bearing system, comprising (a) a base plate, (b) one or more force measuring sensors, wherein each of the one or more force measuring sensors includes a top surface and a bottom surface, and wherein the bottom surface of each of the one or more force measuring sensors is coupled to the base plate, and (c) a first sliding surface coupled to the top surface of each of the one or more force measuring sensors.Type: GrantFiled: May 9, 2017Date of Patent: October 29, 2019Assignee: University of ConnecticutInventors: Arash Esmaili Zaghi, Kevin McMullen, Michael V. Hoagland
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Publication number: 20170328407Abstract: In one aspect, the present disclosure provides a sliding bearing system, comprising (a) a base plate, (b) one or more force measuring sensors, wherein each of the one or more force measuring sensors includes a top surface and a bottom surface, and wherein the bottom surface of each of the one or more force measuring sensors is coupled to the base plate, and (c) a first sliding surface coupled to the top surface of each of the one or more force measuring sensors.Type: ApplicationFiled: May 9, 2017Publication date: November 16, 2017Inventors: Arash Esmaili Zaghi, Kevin McMullen, Michael V. Hoagland
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Patent number: 9745119Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: GrantFiled: December 23, 2013Date of Patent: August 29, 2017Assignee: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, David L. Halbmaier, John Lystad
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Publication number: 20140183076Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: ApplicationFiled: December 23, 2013Publication date: July 3, 2014Applicant: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, David L. Halbmaier, John Lystad
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Patent number: 8613359Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: GrantFiled: July 30, 2012Date of Patent: December 24, 2013Assignee: Entegris, Inc.Inventors: Steven Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Publication number: 20130020220Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.Type: ApplicationFiled: July 30, 2012Publication date: January 24, 2013Applicant: ENTEGRIS, INC.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Patent number: 8231005Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Type: GrantFiled: September 27, 2006Date of Patent: July 31, 2012Assignee: Entegris, Inc.Inventors: Steven P. Kolbow, Kevin McMullen, Anthony Mathius Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad
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Publication number: 20090301917Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Type: ApplicationFiled: September 27, 2006Publication date: December 10, 2009Applicant: ENTEGRIS, INC.Inventors: Steven Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, Christian Andersen, Huaping Wang, Michael Cisewski, Michael L. Johnson, David L. Halbmaier, John Lystad