Abstract: A radio frequency micro-electromechanical switch (RF MEMS switch) is described. Also described is a method of producing such an RF MEMS switch. The method can include depositing on a substrate a first sacrificial layer and producing a pattern. A first layer of metal is deposited on the first sacrificial layer and on the substrate. A pattern is produced to form a first RF line and a first MEMS membrane. A second sacrificial layer is deposited on the first RF line and a pattern is produced. A dielectric layer is deposited on the second sacrificial layer and then a pattern is produced to form a dome. The first and second sacrificial layers are removed through a dome opening. A second metal layer is deposited on the dome and on the substrate, and then a pattern is produced to plug the dome opening(s) and to form a second RF line.

Abstract: A radio frequency micro-electromechanical switch (generally referred to using the acronyms RF MEMS) is described. Also described is a method of producing such an RF MEMS switch.

Abstract: A radio frequency micro-electromechanical switch (generally referred to using the acronyms RF MEMS) is described. Also described is a method of producing such an RF MEMS switch.

Abstract: The present invention relates to a compact slot antenna formed, in a multilayer substrate comprising, in order, at least one first conductive layer, a first dielectric layer, a second conductive layer, a second dielectric layer and a third conductive layer, of a first slot-line realized in the second conductive layer, said first slot-line being connected to the supply of the antenna, of a second and a third slot-lines realized respectively in the first and in the third conductive layers, the second and third slot-lines each being delimited by two conductive strips of which a first extremity, supply side, is interconnected by a via passing through a window realized in the second conductive layer and a second extremity connected to the second conductive layer, both conductive strips on the side of the second extremity being, either in open circuit, or in short circuit, the electrical length of the first, second and third slot-lines being a function of the wavelength at the operating frequency of the antenna.

Abstract: The present invention relates to a compact slot antenna formed, in a multilayer substrate comprising, in order, at least one first conductive layer, a first dielectric layer, a second conductive layer, a second dielectric layer and a third conductive layer, of a first slot-line realised in the second conductive layer, said first slot-line being connected to the supply of the antenna, of a second and a third slot-lines realised respectively in the first and in the third conductive layers, the second and third slot-lines each being delimited by two conductive strips of which a first extremity, supply side, is interconnected by a via passing through a window realised in the second conductive layer and a second extremity connected to the second conductive layer, both conductive strips on the side of the second extremity being, either in open circuit, or in short circuit, the electrical length of the first, second and third slot-lines being a function of the wavelength at the operating frequency of the antenna.