Abstract: A communications interface system and method for a plasma generator is provided. The communications interface system includes a power delivery system component that has a standard POD interface for communicating information that complies with a first protocol. A portable device is coupled between the standard POD interface and a second communication interface for communicating information therebetween. The second communication interface communicates information in a format that complies with a second protocol. The portable device is detachable from the standard POD interface and the second communication interface. A first communication link couples the standard POD interface to the portable device. A second communication link couples the portable device to the second communication interface.

Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.

Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.

Abstract: A phase detector which determines the phase based upon the output signals from a power coupler. The power coupler outputs a first signal and a second signal. The first and second signals are input to a magnitude detector which determines the magnitude of the relative phase between the first and second signals. The first and second signals are also input to a sign discriminator which determines the sign of the phase between the first and second signals.

Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.

Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.

Abstract: A phase detector which determines the phase based upon the output signals from a power coupler. The power coupler outputs a first signal and a second signal. The first and second signals are input to a magnitude detector which determines the magnitude of the relative phase between the first and second signals. The first and second signals are also input to a sign discriminator which determines the sign of the phase between the first and second signals.

Abstract: A communications interface system and method for a plasma generator is provided. The communications interface system includes a power delivery system component that has a standard POD interface for communicating information that complies with a first protocol. A portable device is coupled between the standard POD interface and a second communication interface for communicating information therebetween. The second communication interface communicates information in a format that complies with a second protocol. The portable device is detachable from the standard POD interface and the second communication interface. A first communication link couples the standard POD interface to the portable device. A second communication link couples the portable device to the second communication interface.

Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.

Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.

Abstract: A radio frequency (RF) power generator system includes a power generator that generates a RF power signal that is output to a load. The RF generator generates a forward power feedback signal and a reverse power feedback signal. A controller receives the forward power feedback signal and the reverse power feedback signal. The controller generates a setpoint signal that is output to the power generator. A setpoint modifier receives the forward feedback signal, the reverse feedback signal and an external setpoint signal. The setpoint modifier calculates a forward power limit based on the forward and reverse power feedback signals. The setpoint modifier and outputs a modified setpoint signal to the controller based on one of the forward power limit and the external setpoint signal. The setpoint modifier and the controller can be integrated.

Abstract: Plasma process control arrangement controls a plasma generator that provides electrical power to a plasma chamber for an RF or DC plasma process. A sensor system detects operating parameters of the electrical power, including voltage and current levels. A process detection system (pds) controller has inputs coupled to the sensor system to receive the operating parameters, a programmable memory unit for storing a control program to compute an output control signal based on the operating parameters, and a control output coupled to a control input of the plasma generator. An external computer device, includes a monitor, an icon copying device for example, a mouse suitable for drag-and-drop operation, and a memory storing a suitable code-building program for generating a user-selected control program according to user-determined process requirements.