Abstract: A system and method for treating a substrate is described. In particular, the system and method for treating a substrate include techniques for removing particles from the surface of a microelectronic substrate. The system includes: a vacuum process chamber; a substrate stage for supporting a microelectronic substrate within the vacuum process chamber; a cryogenic fluid supply system that can provide a fluid or fluid mixture through one or more nozzles arranged within the vacuum process chamber to inject a fluid spray into the process chamber in a direction towards an upper surface of the microelectronic substrate; and a process monitoring system coupled to the vacuum process chamber, and arranged to collect fluid spray data corresponding to at least one measured attribute of the injected fluid spray downstream of an exit of the one or more nozzles.

Abstract: A system and method for treating a substrate is described. In particular, the system and method for treating a substrate include techniques for removing particles from the surface of a microelectronic substrate. The system includes: a vacuum process chamber; a substrate stage for supporting a microelectronic substrate within the vacuum process chamber; a cryogenic fluid supply system that can provide a fluid or fluid mixture through one or more nozzles arranged within the vacuum process chamber to inject a fluid spray into the process chamber in a direction towards an upper surface of the microelectronic substrate; and a process monitoring system coupled to the vacuum process chamber, and arranged to collect fluid spray data corresponding to at least one measured attribute of the injected fluid spray downstream of an exit of the one or more nozzles.

Abstract: A communication system, network, interface, and port architecture are provided for transporting data across a network. The network can be arranged by connecting the ports in a daisy chain fashion to achieve a ring architecture or topology. The network forwards data according to a specific network protocol. A first port forwards frames having a preemptive acknowledge field before the payload. A second port receives these frames, stores them in a frame buffer and modifies the preemptive acknowledge field according to its available frame buffer capacity. Said first port controls its data flow according to the modified preemptive acknowledge field.

Abstract: A communication system, network, interface, and port architecture are provided for transporting data across a network. The network can be arranged by connecting the ports in a daisy chain fashion to achieve a ring architecture or topology. The network forwards data according to a specific network protocol. A first port forwards frames having a preemptive acknowledge field before the payload. A second port receives these frames, stores them in a frame buffer and modifies the preemptive acknowledge field according to its available frame buffer capacity. Said first port controls its data flow according to the modified preemptive acknowledge field.

Abstract: A facility for presenting a visual user interface for guiding the performance of a process relating to a patient localization and tracking system is described. The facility displays the user interface in a first state that corresponds to a first process task in an ordered sequence of process tasks. Each time the process task to which the displayed state of the user interface corresponds is completed, the facility redisplays the user interface in a state corresponding to a process task following the process task to which the displayed state of the user interface corresponds.