Abstract: An aerosol generating device comprising first and second housing elements configured to move between an open position and a closed position, wherein, in the closed position, the first and second housing elements together define an aerosol generation chamber configured to enclose a portion of aerosol generating substrate, and further define an air flow channel comprising an inlet, an outlet and the aerosol generation chamber, wherein the first and/or second housing element comprises a sealing member configured to seal at least part of the air flow channel between the inlet and outlet, in the closed position, the first and second housing elements are configured to engage with each other to define the aerosol generation chamber by moving along an approach direction, and the sealing member comprises a wall member extending in the approach direction.

Abstract: A layered heater assembly for an aerosol generating device, comprising: a heat conduction layer operable to emit heat through an external surface of the layered heater assembly; a first electrically conductive track operable to generate heat; and an electrical insulation layer between the heat conduction layer and the first 5 electrically conductive track. A method for manufacturing the layered heater assembly, and an aerosol generating device incorporating the layered heater assembly.

Abstract: A DI water purification system for the point-of-use purification of water in applications demanding the highest quality of water. The system includes the following components: 1. dual submicron filters of 0.2 micron rating in parallel, housed in chemically inert housings; 2. a stacked-membrane or spiral-wound Ultrafilter module of nominal rating of 5000 to 100,000 molecular weight; 3. purge flowmeters appropriate to the purge requirements of the Ultrafilter; 4. chemically inert piping, gasket and sealing materials used to join the various sections of the system; and, 5. chemically resistant supports and housings to mechanically fasten the various components together. The DI water purification system is suitable for use in industries such as semiconductor, medical, pharmaceutical, chemical or any other application or use requiring ultrafiltered DI water.

Abstract: Microprocessor controlled isopropyl alcohol vapor dryer system for robotic drying of wafer cassettes containing wafers or substrates. A wetted wafer or substrate is robotically placed into a virgin isopropyl alcohol vapor zone. The wetted surface and free-moving contaminants are replaced by a layer of isopropyl alcohol (IPA) which condenses on the surface. The dryer then robotically moves the IPA coated wafer or substrate into an upper cooling zone causing the isopropyl alcohol layer to flash off of the substrate surface, leaving the surface completely dry to a molecular level. IPA vapors are heated at the bottom of a quartz tank and maintained as a vapor by electric heating panels surrounding the quartz tank.