Patents by Inventor Kevin T. Wu

Kevin T. Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9390884
    Abstract: A semiconductor substrate inspection system includes an e-beam inspection system configured to deliver electrons to a specimen semiconductor substrate. A sensor is configured to detect reflected electrons that reflect off the surface of the specimen semiconductor substrate. An analysis unit is configured to determine a number of electrons received by the semiconductor substrate, and to determine at least one target region including at least one defect of the semiconductor substrate. A reference image module is in electrical communication with the analysis unit. The reference image module is configured to generate a first digital image having a plurality of pixels, and to adjust a gray-scale level of the pixels included in the target region based on the number electrons included in each pixel to generate a second digital image that excludes the at least one defect.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: July 12, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Eric C. Harley, Oliver D. Patterson, Kevin T. Wu
  • Publication number: 20150325406
    Abstract: A semiconductor substrate inspection system includes an e-beam inspection system configured to deliver electrons to a specimen semiconductor substrate. A sensor is configured to detect reflected electrons that reflect off the surface of the specimen semiconductor substrate. An analysis unit is configured to determine a number of electrons received by the semiconductor substrate, and to determine at least one target region including at least one defect of the semiconductor substrate. A reference image module is in electrical communication with the analysis unit. The reference image module is configured to generate a first digital image having a plurality of pixels, and to adjust a gray-scale level of the pixels included in the target region based on the number electrons included in each pixel to generate a second digital image that excludes the at least one defect.
    Type: Application
    Filed: May 9, 2014
    Publication date: November 12, 2015
    Applicant: International Business Machines Corporation
    Inventors: Eric C. Harley, Oliver D. Patterson, Kevin T. Wu
  • Patent number: 8750597
    Abstract: A method of performing inspection alignment point selection for semiconductor devices includes importing, with a computer device, one or more semiconductor design files corresponding to an area of a semiconductor die; aligning a design taken from the one or more semiconductor design files with an image taken from a die of a semiconductor wafer; and selecting an alignment point and recording a portion of the design file corresponding to the alignment point as a master reference image.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: June 10, 2014
    Assignee: International Business Machines Corporation
    Inventors: Oliver D. Patterson, Kevin T. Wu
  • Publication number: 20130129189
    Abstract: A method of performing inspection alignment point selection for semiconductor devices includes importing, with a computer device, one or more semiconductor design files corresponding to an area of a semiconductor die; aligning a design taken from the one or more semiconductor design files with an image taken from a die of a semiconductor wafer; and selecting an alignment point and recording a portion of the design file corresponding to the alignment point as a master reference image.
    Type: Application
    Filed: November 23, 2011
    Publication date: May 23, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin T. Wu, Oliver D. Patterson
  • Patent number: 8135798
    Abstract: An over-the-air device services and management system includes a web applications server for providing a software download service, an account management server for providing an account maintenance service, and a synchronization server for providing a data management service. The suite of services offered by these servers may be wirelessly accessed from a client device.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: March 13, 2012
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Bharat Welingkar, Srikiran Prasad, William Eisner, Kevin T. Wu
  • Publication number: 20080114855
    Abstract: An over-the-air device services and management system includes a web applications server for providing a software download service, an account management server for providing an account maintenance service, and a synchronization server for providing a data management services. The suite of services offered by these servers may be wirelessly accessed from a client device.
    Type: Application
    Filed: November 15, 2006
    Publication date: May 15, 2008
    Inventors: Bharat Welingkar, Srikiran Prasad, William Eisner, Kevin T. Wu