Patents by Inventor Kexing Cecilia Du

Kexing Cecilia Du has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for inspecting the surface of a wafer
    Patent number: 6167148
    Abstract: An improved wafer surface inspection system is disclosed. In one embodiment, the object surface inspection system includes a translation stage that generates relative motion between an object viewing device such as an objective lens and the surface of the object being inspected. A translation stage controller controls the relative movement of the object surface and the object viewing device. The translation stage controller determines current coordinates for the object surface and the object viewing device, compares the current coordinates to target coordinates generated by a processor, and generates a trigger signal in response to a match between the current coordinates to the target coordinates. A camera receives an image through the object viewing device and captures the image in response to the trigger signal while the translation stage generates relative motion between the object surface and the object viewing device.
    Type: Grant
    Filed: June 30, 1998
    Date of Patent: December 26, 2000
    Assignee: Ultrapointe Corporation
    Inventors: Louis D. Calitz, Kexing Cecilia Du, M. Kent Norton, Bruce W. Worster