Patents by Inventor Khalid Khulusi Tahboub

Khalid Khulusi Tahboub has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithography optics adjustment and monitoring
    Patent number: 10095118
    Abstract: Methods and apparatus for in situ compensation for damage or misalignment of optical elements are disclosed. Also disclosed are methods and apparatus for facilitating alignment of replacement optical elements so that the amount of time in a system including the optical elements can be reduced. Also disclosed are methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system and/or misalignment of the optical elements. Information pertaining to an extent of damage to optical elements in the optical system can be used to optimally schedule maintenance events for the optical system.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: October 9, 2018
    Assignee: CYMER, LLC
    Inventors: Thomas Frederick Allen Bibby, Khalid Khulusi Tahboub, Donald James Haran, Rostislav Rokitski, Joshua Jon Thornes
  • LITHOGRAPHY OPTICS ADJUSTMENT AND MONITORING
    Publication number: 20180017875
    Abstract: Methods and apparatus for in situ compensation for damage or misalignment of optical elements are disclosed. Also disclosed are methods and apparatus for facilitating alignment of replacement optical elements so that the amount of time in a system including the optical elements can be reduced. Also disclosed are methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system and/or misalignment of the optical elements. Information pertaining to an extent of damage to optical elements in the optical system can be used to optimally schedule maintenance events for the optical system.
    Type: Application
    Filed: July 12, 2016
    Publication date: January 18, 2018
    Inventors: Thomas Frederick Allen BIBBY, Khalid Khulusi Tahboub, Donald James Haran, Rostislav Rokitski, Joshua Jon Thornes