Patents by Inventor Khalil Feghali

Khalil Feghali has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hexafluoroalcohol-based Monomers and Processes of Preparation Thereof
    Publication number: 20090143611
    Abstract: The present invention relates to compounds of formula (I): wherein R1 is H, or a C1-C10 linear, branched or cyclic alkyl group which is unsubstituted or substituted with fluorine; R2 is an alicyclic group having 5 to 20 carbon atoms which is unsubstituted or substituted with fluorine; and R3 represents a C1-C10 linear or branched alkylene which is unsubstituted or substituted with fluorine. Processes for preparing such compounds are also disclosed. The compounds of the present invention can be used as monomers in the fields of photolithography and semiconductor fabrication.
    Type: Application
    Filed: November 14, 2005
    Publication date: June 4, 2009
    Applicants: ST-JEAN PHOTOCHIMIE INC., INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Shahrokh Motallebi, Denis Desilets, Ian Marcotte, Luc Bouchard, Khalil Feghali, Pushkara Rao Varanasi, Mahmoud Khojasteh