Patents by Inventor Khim Ng

Khim Ng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of etching a semiconductor device
    Publication number: 20050233515
    Abstract: A method for etching windows 40 in a semiconductor device 10 having a metal fuse 14 embedded therein is disclosed. The method is for allowing accurate fuse blowing, in particular laser fuse blowing. The method involves the controlled removal of layers having different phase diffraction characteristics. After treatment, the remaining area between the metal fuse 14 and the etched surface of the semiconductor has substantially uniform phase diffraction characteristics.
    Type: Application
    Filed: December 23, 2003
    Publication date: October 20, 2005
    Applicant: SYSTEMS ON SILICON MANUFACTURING COMPANY PET. LTD
    Inventors: Khim Ng, Chin Ling Pong
  • Titanium underlayer for lines in semiconductor devices
    Publication number: 20050116350
    Abstract: A thin Titanium underlayer 22 is included beneath a Titanium rich Titanium Nitride layer 28 in a metal line 20 on a silicon substrate to reduce stress voiding.
    Type: Application
    Filed: January 20, 2003
    Publication date: June 2, 2005
    Applicant: Systems on Silicon Manufacturing Co. PTE. LTD.
    Inventors: Khim Ng, Yeow Ng, Kar Koh