Abstract: An optical stylus may be capable of providing active illumination for a touch/proximity sensing apparatus. The optical stylus also may be capable of determining a tilt angle of the optical stylus and/or an amount of pressure exerted upon the optical stylus. In some examples, an optical stylus may determine a tilt angle and/or pressure according to changes in optical flux distributions inside the optical stylus. In some examples, an optical stylus may include a deformable tip. The deformable tip and/or associated features may be capable of altering optical flux distributions inside the optical stylus in response to applied pressure and/or optical stylus tilt. In some implementations, the optical flux provided to the light guide by the optical stylus may vary according to pressure applied to the optical stylus.

Abstract: An interactive display, including a cover glass having a front surface that includes a viewing area provides an input/output (I/O) interface for a user of an electronic device. An arrangement includes a processor, a light source, and a camera disposed outside the periphery of the viewing area coplanar with or behind the cover glass. The camera receives scattered light resulting from interaction, with an object, of light outputted from the interactive display, the outputted light being received by the cover glass from the object and directed toward the camera. The processor determines, from image data output by the camera, an azimuthal angle of the object with respect to an optical axis of the camera and/or a distance of the object from the camera.

Abstract: A touch and hover-sensitive sensor system is provided. The system may include a planar light guide that has a plurality of light sources located along a first edge of the light guide and a plurality of light sensors located along a second edge of the light guide orthogonal to the first edge. The light guide may include light-turning arrangements that are configured to redirect light passing through a first side of the light guide from/along orthogonal directions within the light guide. A controller may illuminate proper subsets of the light sources; light that is emitted from the first side and that encounters an object, e.g., a fingertip, may be reflected back into the first side and then redirected to the light sensors. Depending on the light sensors that detect the highest redirected reflected light intensity and the active light sources, the controller may determine the XY/XYZ location of the object.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for providing a compact, low-sensor count scanning display that is capable of both displaying graphical content and of capturing images of objects placed on or above the scanning display. Various implementations are discussed, including raster scan, line scan, and compressive sampling version.

Abstract: This disclosure relates to an interactive display, having a front surface including a viewing area, and providing an input/output interface for a user of an electronic device. A planar light guide (PLG) disposed substantially parallel to the front surface, has a periphery at least coextensive with the viewing area. A light-emitting source (LES), disposed outside the periphery of the PLG, is optically coupled with a PLG input. The PLG outputs reflected light, in a direction substantially orthogonal to the front surface, by reflecting light received from the LES. A light collecting device (LCD) collects scattered light that results from interaction of the reflected light with a user-controlled object. The LCD redirects the collected scattered light toward one or more light sensors. A processor recognizes, from outputs of the light sensors, an instance of a user gesture, and controls the interactive display and/or electronic device, responsive to the user gesture.

Abstract: Etching equipment and methods are disclosed herein for more efficient etching of sacrificial material from between permanent MEMS structures. An etching head includes an elongate etchant inlet structure, which may be slot-shaped or an elongate distribution of inlet holes. A substrate is supported in proximity to the etching head in a manner that defines a flow path substantially parallel to the substrate face, and permits relative motion for the etching head to scan across the substrate.

Abstract: Etching equipment and methods are disclosed herein for more efficient etching of sacrificial material from between permanent MEMS structures. An etching head includes an elongate etchant inlet structure, which may be slot-shaped or an elongate distribution of inlet holes. A substrate is supported in proximity to the etching head in a manner that defines a flow path substantially parallel to the substrate face, and permits relative motion for the etching head to scan across the substrate.