Abstract: According to an aspect of the present disclosure, there is provided a substrate treating apparatus comprising: a vessel part having a substrate treatment region formed therein and including a supply port through which a treating fluid is supplied to the substrate treatment region and an exhaust port through which the treating fluid is exhausted from the substrate treatment region; a fluid supply unit configured to supply the treating fluid to the substrate treatment region; an exhaust unit configured to exhaust the treating fluid from the vessel part. The exhaust unit comprises: a main line connected to the exhaust port; an extension line branched from at least one of first and second nodes of the main line and including at least one of a first orifice or a first check valve to control an exhaust speed; and an auxiliary line branched from a third node of the main line, where an orifice and a check valve are not formed.

Abstract: A substrate transport robot capable of enhancing processing speed and avoiding interference with structures and a system including the substrate transport robot are provided. The substrate transport robot includes: one or more robot arms including transfer hands and transferring semiconductor substrates with the transfer hands; an arm driving module coupled to each of the robot arms and controlling the movement of each of the robot arms; and a horizontal/vertical movement module controlling the position movement of the arm driving module, wherein multiple robot arms are provided, and multiple transfer hands are included in each of the multiple robot arms.

Abstract: Proposed is a detachable lighting device including lighting units. The positions of the lighting units are changeable along a mounting rail within an interior space. The number of the lighting units and the mounting positions of the lighting units are adjustable. Accordingly, occupants within the interior space adjust light distribution as desired by each occupant.

Abstract: Disclosed are a low-temperature de-NOx catalyst using a ceria-alumina complex support, and a method of manufacturing the same. According to the present invention, provided is a low-temperature de-NOx catalyst using a ceria-alumina complex support, manufactured by impregnating noble metal and metal oxides into a ceria-alumina complex support synthesized by treating a ceria precursor and an alumina precursor in a predetermined mass ratio by a co-precipitation method.

Abstract: An embodiment energy source door assembly includes an external cover, a heat cover mounted on the external cover, and a heat film disposed between the external cover and the heat cover, wherein the heat film is configured to generate heat when electric energy is applied thereto. In an embodiment, the energy source door assembly further includes a thermal pad interposed between the heat film and the heat cover.

Abstract: The present invention relates to a catalyst-supporting organic-inorganic hybrid composite particle, and more particularly, to a technique of adjusting a desired pot life and curing speed by preparing a catalyst-supporting organic-inorganic hybrid composite particle by adding a catalyst for polyurethane reaction to a catalyst-supporting particle prepared by stirring an alkoxy silane-functionalized polyurethane precursor and the tetraethyl orthosilicate for a certain period of time and mixing them, and adjusting an initiation rate for polyurethane polymerization through the prepared catalyst-supporting organic-inorganic hybrid composite particle.

Abstract: Disclosed are a low-temperature de-NOx catalyst using a ceria-alumina complex support, and a method of manufacturing the same. According to the present invention, provided is a low-temperature de-NOx catalyst using a ceria-alumina complex support, manufactured by impregnating noble metal and metal oxides into a ceria-alumina complex support synthesized by treating a ceria precursor and an alumina precursor in a predetermined mass ratio by a co-precipitation method.

Abstract: A hydrogen production device is provided. The device comprises: a dry reforming reaction unit for directly reacting methane and carbon dioxide in biogas to produce a synthesis gas containing hydrogen; and a gas shift unit for reacting carbon monoxide in the synthesis gas produced in the dry reforming reaction unit with water vapor to produce carbon dioxide and hydrogen, and for capturing the produced carbon dioxide.

Abstract: A method of manufacturing a press polymer-bonded explosive, in which a polymer emulsion is used to maximize the efficiency of a process, and a press polymer-bonded explosive manufactured using the same. The method includes a polymer-emulsion-manufacturing step of mixing a monomer of a polymer binder and an emulsifier with a process water and then adding an initiator to thus manufacture a polymer emulsion using a polymerization reaction, a slurry-manufacturing step of mixing a raw material including an explosive and an emulsion breaker with fresh process water to thus manufacture a slurry, an agglomerated-particle-forming step of adding the manufactured polymer emulsion to the manufactured slurry to thus form agglomerated particles in which a surface of the raw material is coated with the polymer binder, and an agglomerated-particle-obtaining step of collecting the agglomerated particles using filtration and drying the collected agglomerated particles.

Abstract: A carbon dioxide adsorbent may include a double salt having a first metal salt and a second metal salt. The first metal salt may include a first metal selected from Ca, Sr, and Ba. The second metal salt may include a second metal selected from Li, Na, K, Rb, and Cs. The present disclosure also discloses a process for preparing the carbon dioxide adsorbent and a method of separating carbon dioxide using the same.

Abstract: A carbon dioxide adsorbent may include a double salt having a first metal salt and a second metal salt. The first metal salt may include a first metal selected from Ca, Sr, and Ba. The second metal salt may include a second metal selected from Li, Na, K, Rb, and Cs. The present disclosure also discloses a process for preparing the carbon dioxide adsorbent and a method of separating carbon dioxide using the same.

Abstract: The present invention relates to an apparatus that produces a high-purity gas of producing a high-purity gas using the apparatus. An apparatus for producing a high-purity gas according to an embodiment of the invention may include a column configured to perform a sorption-enhanced reaction for removing a reaction by-product produced through a catalyst reaction by using sorption, wherein the column is divided into a plurality of sections, and the plurality of sections have decreasing proportions of a catalyst and increasing proportions of an adsorbent from a front end towards a rear end along a reaction path, and wherein the sorption-enhanced reaction is a sorption-enhanced steam methane reforming (SE-SMR) reaction for producing hydrogen by a methane reforming reaction and removing a by-product of carbon dioxide.

Abstract: The present invention relates to an apparatus that produces a high-purity gas and to a method of producing a high-purity gas using the apparatus. An apparatus for producing a high-purity gas according to an embodiment of the invention may include a column configured to perform a sorption-enhanced reaction for removing a reaction by-product produced through a catalyst reaction by using sorption, where the column is divided into a multiple number of sections, and the multiple sections have decreasing proportions of a catalyst and increasing proportions of an adsorbent from a front end towards a rear end along a reaction path. According to an embodiment of the invention, a multi-section column may be applied to obtain an increased amount of gas production compared with the conventional sorption-enhanced reaction, even with the same amounts of catalyst and adsorbent.

Abstract: A carbon dioxide adsorbent may include a double salt having a first metal salt and a second metal salt. The first metal salt may include a first metal selected from Ca, Sr, and Ba. The second metal salt may include a second metal selected from Li, Na, K, Rb, and Cs. The present disclosure also discloses a process for preparing the carbon dioxide adsorbent and a method of separating carbon dioxide using the same.

Abstract: The present invention relates to an apparatus that produces a high-purity gas of producing a high-purity gas using the apparatus. An apparatus for producing a high-purity gas according to an embodiment of the invention may include a column configured to perform a sorption-enhanced reaction for removing a reaction by-product produced through a catalyst reaction by using sorption, wherein the column is divided into a plurality of sections, and the plurality of sections have decreasing proportions of a catalyst and increasing proportions of an adsorbent from a front end towards a rear end along a reaction path, and wherein the sorption-enhanced reaction is a sorption-enhanced steam methane reforming (SE-SMR) reaction for producing hydrogen by a methane reforming reaction and removing a by-product of carbon dioxide.

Abstract: The present invention relates to an apparatus that produces a high-purity gas and to a method of producing a high-purity gas using the apparatus. An apparatus for producing a high-purity gas according to an embodiment of the invention may include a column configured to perform a sorption-enhanced reaction for removing a reaction by-product produced through a catalyst reaction by using sorption, where the column is divided into a multiple number of sections, and the multiple sections have decreasing proportions of a catalyst and increasing proportions of an adsorbent from a front end towards a rear end along a reaction path. According to an embodiment of the invention, a multi-section column may be applied to obtain an increased amount of gas production compared with the conventional sorption-enhanced reaction, even with the same amounts of catalyst and adsorbent.

Abstract: A wafer testing apparatus includes a temperature controller for comparing a predetermined first dew point with a second dew point in a prober, and a dry air controller for controlling an amount of dry air supplied into the prober based on a comparison result of the temperature controller.

Abstract: Provided is a process for preparing a compound of formula 1 or its salt, which comprises reacting a compound represented by the following formula 4 with acetaldehyde in a mixed solvent comprising water, isopropanol, and methylenechloride in a volume ratio of 1:3-6:11-14 in the presence of a first base to stereospecifically prepare a compound represented by the following formula 3?; and reacting the compound of the formula 3? with an anhydrous compound represented by the following formula 2 in the presence of a second base: wherein R1 is a hydrogen or an amino protecting group, R2 is a hydrogen or a carboxyl protecting group, and R3 is a hydrogen or an amino protecting group consisting of phenylacetyl group, wherein when R3 is a phenylacetyl group, R2 is not a hydrogen in formula 3?; and wherein, when at least one of R2 and R3 is a protecting group, all such protecting groups are removed from formula 3?, thereby producing a compound represented by formula 6 prior to reacting it with the compound o

Abstract: Provided is a process for preparing a compound of formula 1 or its salt, which includes reacting a compound of formula 2 with a compound of formula 3 in the presence of a base.

Abstract: Provided is a process for preparing a compound of formula 1 or its salt, which includes reacting a compound of formula 2 with a compound of formula 3 in the presence of a base.