Abstract: A control device and a substrate processing apparatus including the same are provided. The substrate processing apparatus includes: a support unit including a spin head and configured to support and to rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a correction unit in a swing arm, the correction unit configured to move to a target point on the substrate and to irradiate a beam when the processing liquid is sprayed onto the substrate; and a control unit configured to calculate the target point, wherein the control unit is configured to convert image coordinates associated with a first coordinate system and then to calculate the target point by converting the image coordinates associated with the first coordinate system into image coordinates associated with a second coordinate system, and the second coordinate system is based on rotation angles of the spin head and the swing arm.

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: An apparatus and method for predicting a friction coefficient of a road surface are disclosed. The apparatus includes a microphone that obtains a sound signal around a tire mounted on a vehicle, and a controller that estimates a state and a type of the road surface and a degree of tire wear corresponding to the sound signal around the tire based on a first deep learning model, estimates a peak adjustment factor and an initial inclination adjustment factor of a friction coefficient curve corresponding to the state and the type of the road surface and the degree of tire wear based on a second deep learning model, and predicts the friction coefficient based on the peak adjustment factor and the initial inclination adjustment factor of the friction coefficient curve.

Abstract: A manufacturing method of a porous polyimide film, includes: preparing a polyamic acid solution at a concentration of 10 to 30 wt % by dissolving a diamine compound and a dianhydride in a solvent; applying the prepared polyamic acid solution to a substrate to prepare a film and then immersing the same in a non-solvent for 30 minutes to 180 minutes; and taking out the immersed film and thermally curing the same; and a porous polyimide film manufactured thereby.

Abstract: A rotor for an induction motor includes a rotor core having a hollow portion on a central portion wherein a shaft is coupled to the rotor core by being inserted through the hollow portion, a plurality of slots radially formed in the rotor core around a central axis of the shaft, a plurality of conductor bars coupled to the plurality of slots, and an end ring electrically connecting the plurality of conductor bars to each other, wherein the rotor core is thermally treated above Curie temperature to form a predetermined pattern on an outer circumference of the rotor core.

Abstract: A system and a method for sensing hydrogen charge state of a fuel cell electric vehicle are provided. The system includes an infrared transmission unit that transmits a fuel door sensing infrared signal for sensing a fuel door opened while charging hydrogen and a nozzle sensing infrared signal for sensing a charging station-side hydrogen charging nozzle connected to a hydrogen charging inlet of a vehicle. An infrared reception unit receives the fuel door sensing infrared signal and thereafter, reflected on a fuel door and the nozzle sensing infrared signal transmitted from the infrared transmission unit and thereafter, reflected on the hydrogen charging nozzle. A controller determines that the vehicle is being charged with hydrogen when sensing an open state of the fuel door and a hydrogen charging inlet connection state of the hydrogen charging nozzle.

Abstract: The present disclosure provides a thermal-activated pressure relief device of a fuel cell vehicle, the thermal-activated pressure relief device including: a hollow body mounted at an outlet of a hydrogen tank; a hydrogen discharge block having a plurality of first hydrogen discharge holes and mounted and fixed in an upper portion of the hollow body; a hydrogen discharge pipe having a plurality of second hydrogen discharge holes and connected to a bottom of the hydrogen discharge block; a piston fitted on an outer side of the hydrogen discharge pipe to be able to move up and down and to open and close the second hydrogen discharge holes; a stopper mounted in a lower portion of the hollow body and limiting a downward movement distance of the piston; and a melting alloy disposed between the piston and the stopper and melting at a predetermined temperature or more.

Abstract: A high-pressure composite container having a gastight nozzle structure includes a metal nozzle formed at a side of an inlet of a plastic liner layer that defines an inner layer of the high-pressure composite container; a nozzle insert which is inserted into and attached to the metal nozzle in a direction from an inner side of the plastic liner layer to an outer side of the plastic liner layer; and a nut member fixed to an upper end portion of the nozzle insert.

Abstract: A system and a method for sensing hydrogen charge state of a fuel cell electric vehicle are provided. The system includes an infrared transmission unit that transmits a fuel door sensing infrared signal for sensing a fuel door opened while charging hydrogen and a nozzle sensing infrared signal for sensing a charging station-side hydrogen charging nozzle connected to a hydrogen charging inlet of a vehicle. An infrared reception unit receives the fuel door sensing infrared signal and thereafter, reflected on a fuel door and the nozzle sensing infrared signal transmitted from the infrared transmission unit and thereafter, reflected on the hydrogen charging nozzle. A controller determines that the vehicle is being charged with hydrogen when sensing an open state of the fuel door and a hydrogen charging inlet connection state of the hydrogen charging nozzle.

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

Abstract: A system and a method for sensing hydrogen charge state of a fuel cell electric vehicle are provided. The system includes an infrared transmission unit that transmits a fuel door sensing infrared signal for sensing a fuel door opened while charging hydrogen and a nozzle sensing infrared signal for sensing a charging station-side hydrogen charging nozzle connected to a hydrogen charging inlet of a vehicle. An infrared reception unit receives the fuel door sensing infrared signal and thereafter, reflected on a fuel door and the nozzle sensing infrared signal transmitted from the infrared transmission unit and thereafter, reflected on the hydrogen charging nozzle. A controller determines that the vehicle is being charged with hydrogen when sensing an open state of the fuel door and a hydrogen charging inlet connection state of the hydrogen charging nozzle.

Abstract: The present disclosure provides a thermal-activated pressure relief device of a fuel cell vehicle, the thermal-activated pressure relief device including: a hollow body mounted at an outlet of a hydrogen tank; a hydrogen discharge block having a plurality of first hydrogen discharge holes and mounted and fixed in an upper portion of the hollow body; a hydrogen discharge pipe having a plurality of second hydrogen discharge holes and connected to a bottom of the hydrogen discharge block; a piston fitted on an outer side of the hydrogen discharge pipe to be able to move up and down and to open and close the second hydrogen discharge holes; a stopper mounted in a lower portion of the hollow body and limiting a downward movement distance of the piston; and a melting alloy disposed between the piston and the stopper and melting at a predetermined temperature or more.

Abstract: The present disclosure relates to a pressure vessel equipped with a permeated gas discharging structure, the pressure vessel including a nozzle boss into and from which a gas flows and is discharged; a liner coupled to a flange portion of the nozzle boss and provided with a space formed therein for receiving fluid; a discharge path forming part configured to form a gas discharging path from the nozzle boss side along an outer surface of the liner in a central axial direction; and a composite material provided at outer sides of the liner and the discharge path forming part.

Abstract: Disclosed herein are a microwave probe capable of precisely detecting a plasma state in a plasma process, a plasma monitoring system including the probe, and a method of fabricating a semiconductor device using the system. The microwave probe includes a body extending in one direction and a head which is connected to one end of the body and has a flat plate shape. In addition, in the plasma process, the microwave probe is non-invasively coupled to a chamber such that a surface of the head contacts an outer surface of a viewport of the chamber, and the microwave probe applies a microwave into the chamber through the head and receives signals generated inside the chamber through the head.

Abstract: A solenoid valve includes: an independently movable pilot plunger head; a main seat including a hole, so that gas flows into the solenoid valve through the hole of the main seat; a main plunger being in contact with the main seat; a pilot plunger disposed at top surface of the main plunger inside the solenoid valve, and including a hollow portion inside the pilot plunger; and a pilot plunger head disposed at one side inside the pilot plunger, and having an apex being in contact with the main plunger. The pilot plunger is movable inside the valve, the pilot plunger head is movable inside the hollow portion of the pilot plunger, and the pilot plunger head and the pilot plunger separately move from each other.

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

Abstract: The present disclosure relates to a pressure vessel equipped with a permeated gas discharging structure, the pressure vessel including a nozzle boss into and from which a gas flows and is discharged; a liner coupled to a flange portion of the nozzle boss and provided with a space formed therein for receiving fluid; a discharge path forming part configured to form a gas discharging path from the nozzle boss side along an outer surface of the liner in a central axial direction; and a composite material provided at outer sides of the liner and the discharge path forming part

Abstract: A pressure vessel for storing high-pressure gas has a structure including: a nozzle body which is coupled to a vessel body that defines an inner wall surface of the pressure vessel, and has an inner flow path through which gas flows inside and outside of the pressure vessel; and a locker which is fastened to a lower portion of the nozzle body, and the structure is configured to provide dual sealing including sealing at an inclined surface by fastening force of the locker generated by an inclined pressing end of the locker, and sealing in the locker by sealing members.

Abstract: A system and a method for sensing hydrogen charge state of a fuel cell electric vehicle are provided. The system includes an infrared transmission unit that transmits a fuel door sensing infrared signal for sensing a fuel door opened while charging hydrogen and a nozzle sensing infrared signal for sensing a charging station-side hydrogen charging nozzle connected to a hydrogen charging inlet of a vehicle. An infrared reception unit receives the fuel door sensing infrared signal and thereafter, reflected on a fuel door and the nozzle sensing infrared signal transmitted from the infrared transmission unit and thereafter, reflected on the hydrogen charging nozzle. A controller determines that the vehicle is being charged with hydrogen when sensing an open state of the fuel door and a hydrogen charging inlet connection state of the hydrogen charging nozzle.

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.