Abstract: The inventive concept provides a substrate treating method. The substrate treating method includes pre-treating a substrate by cleaning the substrate; etching the substrate by supplying an etchant and heating a substrate supplied with the etchant; and post-treating the substrate after the etching the substrate, and wherein the pre-treating the substrate, the etching the substrate, and the post-treating the substrate are each performed in different chambers, a substrate on which the pre-treating the substrate is completed is transferred in a dry state to a chamber at which the etching the substrate is performed, and a substrate on which the etching the substrate is completed is transferred in a wetted state with a liquid to a chamber at which the post-treating the substrate is performed.

Abstract: Discloses are a method and apparatus for performing transmission and reception in a mobile communication system. In other words, a user equipment (UE) receives channel state information-reference signal (CSI-RS) from a base station. Further, the UE performs CSI feedback after receiving the CSI-RS from the base station. Here, proposed are the method and apparatus in which at least one of the CSI-RS reception and the CSI feedback transmission is triggered by receiving downlink control information (DCI) including parameter information associated with network energy saving.

Abstract: Provided are methods and devices for performing positioning in a next-generation wireless network. The method of a UE for performing positioning include identifying configuration information for a transmission bandwidth of a positioning reference signal (PRS) configured per cell and receiving the positioning reference signal corresponding to each cell based on the configuration information for the transmission bandwidth.

Abstract: Provided are a method and apparatus for controlling a paging operation. The method may include receiving a paging message including identification information for each terminal for identifying a target to perform a paging operation and determining whether to apply the paging message on the basis of the identification information.

Abstract: Provided are methods and apparatuses for transmitting HARQ feedback information for sidelink transmission. In particular, a method of a transmitting user equipment (UE) is provided for transmitting the HARQ feedback information for the sidelink transmission. The method may include: receiving, from the base station, resource assignment information on a physical uplink control channel (PUCCH) for transmitting, to the base station, the HARQ feedback information for the sidelink transmission to a receiving UE; generating the HARQ feedback information based on a physical sidelink feedback channel (PSFCH) for the sidelink transmission received from the receiving UE; and transmitting the HARQ feedback information over the PUCCH based on the resource assignment information to the base station.

Abstract: Provided are a method and a device performing wireless communication in an unlicensed band, which receives information on allocating a radio resource in a system bandwidth made up of a plurality of subbands, receives information on a LBT (Listen Before Talk) failure region among the radio resource, and receives a downlink signal in other regions in the radio resource, except the LBT failure region.

Abstract: Provided are a method and an apparatus for performing an initial access in a limited bandwidth. The method of a user equipment (UE) for performing an initial access in a limited bandwidth may include receiving at least one of i) first configuration information which is configured for a UE having a limited bandwidth in which an available bandwidth is narrower than a predetermined bandwidth and ii) second configuration information which is configured for a UE having the predetermined bandwidth, and performing an initial access based on one of the first configuration information and the second configuration information.

Abstract: Provided are a method and an apparatus for controlling a search space. The method may include receiving configuration information for at least one search space, receiving indication information on at least one of time duration information and search space information for not monitoring a downlink control channel for the at least one search space, and monitoring the downlink control channel based on the indication information.

Abstract: to the provided are a method and an apparatus for transmitting/receiving sidelink HARQ feedback information. The method for transmitting the HARQ feedback information for sidelink transmission by a user equipment (UE) may include receiving configuration information for a sidelink resource pool for the sidelink transmission, receiving a physical sidelink shared channel (PSSCH) from another UE through a resource allocated in the sidelink resource pool, and transmitting the HARQ feedback information for reception of the PSSCH through a physical sidelink feedback channel (PSFCH) resource allocated in the sidelink resource pool.

Abstract: Provided are a method and a device for hopping a frequency to perform uplink transmission. The method may include: receiving frequency hopping configuration information for a transport block transmitted using a plurality of slots; determining a frequency resource location to be hopped in the plurality of slots based on the frequency hopping configuration information; and transmitting the transport block through the plurality of slots according to the frequency resource location.

Abstract: Provided are a method and device for performing wireless communication in an unlicensed band. The method, for performing wireless communication in an unlicensed band by a terminal, may include: receiving configuration information relating to a synchronization signal block (SSB) burst set in an unlicensed band; receiving transmission interval information in which an SSB is transmitted in the SSB burst set on the basis of a listen-before-talk (LBT) result with respect to the unlicensed band; and detecting the SSB in the SSB burst set on the basis of the transmission interval information.

Abstract: Provided are a method and device for transmitting/receiving data in a half-duplex scheme. The method may include performing, as a first operation, one of signal transmission through an uplink and signal reception through a downlink in an FDD channel environment, receiving information indicating, as a second operation, the other of the signal transmission through the uplink and the signal reception through the downlink while performing the first operation, and stopping the first operation and performing the second operation according to the reception of the information.

Abstract: Provided are methods and apparatuses for receiving information regarding modulation and demodulation in sidelink communication. The methods and apparatuses may receive configuration information on a resource pool used for sidelink transmission, receive information on an MCS (Modulation and Coding Scheme) table used for modulation of a sidelink signal among at least one MCS tables for the resource pool based on the configuration information, and perform demodulation on the received sidelink signal based on the information on the received MCS table.

Abstract: Provided are methods and apparatuses for transmitting and/or receiving sidelink HARQ feedback information. Further, a method of a user equipment (UE) may be provided for transmitting HARQ feedback information in response to sidelink transmission. The method may include: receiving configuration information for a resource pool for the sidelink transmission, receiving configuration information on frequency resources for transmission of a physical sidelink feedback channel (PSFCH) in the resource pool, and transmitting HARQ feedback information in response to a physical sidelink shared channel (PSSCH) received from one or more other UE(s) using a PSFCH resource determined based on the configuration information for frequency resources in the resource pool.

Abstract: Provided are a method and a device performing wireless communication in an unlicensed band, which receives information on allocating a radio resource in a system bandwidth made up of a plurality of subbands, receives information on a LBT (Listen Before Talk) failure region among the radio resource, and receives a downlink signal in other regions in the radio resource, except the LBT failure region.

Abstract: Provided are a method and an apparatus for performing an initial access in a limited bandwidth. The method of a user equipment (UE) for performing an initial access in a limited bandwidth may include receiving at least one of i) first configuration information which is configured for a UE having a limited bandwidth in which an available bandwidth is narrower than a predetermined bandwidth and ii) second configuration information which is configured for a UE having the predetermined bandwidth, and performing an initial access based on one of the first configuration information and the second configuration information.

Abstract: Provided are a method and an apparatus for controlling a search space. The method may include receiving configuration information for at least one search space, receiving indication information on at least one of time duration information and search space information for not monitoring a downlink control channel for the at least one search space, and monitoring the downlink control channel based on the indication information.

Abstract: Provided are a method and an apparatus for performing a random access procedure for coverage enhancement. The method of a user equipment (UE) for performing a random access procedure for coverage enhancement may include transmitting a random access channel preamble (RACH Preamble) for repeated transmission of Msg3 through a Physical Random Access Channel (PRACH), receiving a random access response (RAR) including uplink scheduling information for the repeated transmission of the Msg3, and repeatedly transmitting the Msg3 based on the uplink scheduling information.

Abstract: Provided are a method and a device performing wireless communication in an unlicensed band, which receives information on allocating a radio resource in a system bandwidth made up of a plurality of subbands, receives information on a LBT (Listen Before Talk) failure region among the radio resource, and receives a downlink signal in other regions in the radio resource, except the LBT failure region.

Abstract: Provided are a method and a device for performing wireless communication in an unlicensed band. The method of a UE for performing wireless communication in an unlicensed band may include: receiving, in a system band made up of a plurality of sub-bands, information for allocating a radio resource; acquiring, for at least one of sub-bands included in the radio resource, availability information based on the performing of Listen Before Talk (LBT); and transmitting the availability information.