Patents by Inventor Ki-Joan Kim

Ki-Joan Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming fine patterns of a semiconductor device
    Patent number: 6498105
    Abstract: A method of forming fine patterns of semiconductor devices comprises patterning one material layer using at least two sub-photomasks. The material layer is formed on a semiconductor substrate, and the material layer is patterned at least twice using each of the sub-photomasks. The shapes and sizes of the patterns on one sub-photomask are different to those of the other sub-photomask, and the patterns of one sub-photomask may partially overlap those of the other sub-photomask. The profiles of all patterns formed on the one material layer can thereby be optimized.
    Type: Grant
    Filed: June 1, 2000
    Date of Patent: December 24, 2002
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Ki-Joan Kim