Patents by Inventor Ki-Kone KIM

Ki-Kone KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SHOWERHEAD AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME
    Publication number: 20150129132
    Abstract: A showerhead includes a body configured to receive a reaction gas, a nozzle on the body configured to inject the reaction gas to a substrate, and a plurality of conducting members in thermal contact with the body to conduct heat generated from the substrate.
    Type: Application
    Filed: July 24, 2014
    Publication date: May 14, 2015
    Inventors: Hong-Taek LIM, Ki-Kone KIM, Ho-Jun KIM, Jong-Yong BAE, Do-Hyung KIM, Jai-Hyung WON, Seung-Moo LEE