Abstract: A cleaning apparatus in which a cleaning process is simplified, a time required for the cleaning process is reduced and which has an excellent cleaning effect, and a high pressure cleaner for use therein are provided.

Abstract: Provided is a cleaning process which is simplified and in which a time required for the cleaning process is reduced and which has an excellent cleaning effect. The cleaning process comprises loading a wafer in a high pressure cleaner, injecting high-purity gaseous carbon dioxide (CO2) having low pressure into the high pressure cleaner, injecting CO2 having lower pressure than supercritical cleaning pressure into the high pressure cleaner, cleaning the wafer by injecting a supercritical homogeneous transparent phase mixture in which a cleaning additive and supercritical CO2 are mixed, into the high pressure cleaner under a supercritical cleaning pressure, rinsing the wafer by injecting a supercritical rinsing mixture in which a rinsing additive and supercritical CO2 are mixed, into the high pressure cleaner, and separating CO2 from a mixture discharged from the high pressure cleaner.

Abstract: A cleaning apparatus in which a cleaning process is simplified, a time required for the cleaning process is reduced and which has an excellent cleaning effect, and a high pressure cleaner for use therein are provided.

Abstract: Disclosed herein is a method for producing biodiesel in the form of fatty acid alkyl ester by esterifying oils-and-fats, including animal or vegetable oils-and-fats or waste thereof, with supercritical alcohol. According to the disclosed method, it is possible to produce high-purity fatty acid alkyl ester at low cost and high productivity.

Abstract: Provided is a cleaning process which is simplified and in which a time required for the cleaning process is reduced and which has an excellent cleaning effect. The cleaning process comprises loading a wafer in a high pressure cleaner, injecting high-purity gaseous carbon dioxide (CO2) having low pressure into the high pressure cleaner, injecting CO2 having lower pressure than supercritical cleaning pressure into the high pressure cleaner, cleaning the wafer by injecting a supercritical homogeneous transparent phase mixture in which a cleaning additive and supercritical CO2 are mixed, into the high pressure cleaner under a supercritical cleaning pressure, rinsing the wafer by injecting a supercritical rinsing mixture in which a rinsing additive and supercritical CO2 are mixed, into the high pressure cleaner, and separating CO2 from a mixture discharged from the high pressure cleaner.

Abstract: A cleaning apparatus in which a cleaning process is simplified, a time required for the cleaning process is reduced and which has an excellent cleaning effect, and a high pressure cleaner for use therein are provided.

Abstract: Methods for isolating taxol and derivatives thereof with high purity are described. The methods include a supercritical fluid and a cosolvent extraction step, a liquid—liquid separation step, and a column chromatography step. An apparatus for isolating Taxol and derivatives thereof that allows the method steps to be performed online also is described.

Abstract: The invention relates to a method for extracting and preparing alkaloids from plants using supercritical fluid extracting technology and alkaloids prepared by said method. Specifically, the invention relates to a method of preparing alkaloids by mixing plants with carbon dioxide as a major solvent and 1 to 20 parts by weight of at least one alkaline cosolvent selected from a group consisting of methanol, ethanol, water or a mixture thereof wherein 2 to 18 (v/v) % of diethylamine or triethylamine is dissolved in the cosolvent based on 100 parts by weight of carbon dioxide at the temperature of 70 to 90° C. and under 4000 to 6000 PSI of pressure in a supercritical extracting apparatus to extract the alkaloid, and then separating, filtering and purifying the alkaloid using the chromatography, and to alkaloids prepared by said method.

Abstract: Methods for isolating taxol and derivatives thereof with high purity are described. The methods include a supercritical fluid and a cosolvent extraction step, a liquid-liquid separation step, and a column chromatography step. An apparatus for isolating Taxol and derivatives thereof that allows the method steps to be performed online also is described.