Abstract: The present invention relates to a transfer apparatus for a wafer, in which the wafer may be transferred in a narrow space by reducing a transfer device footprint. The transfer device has a base, a lower arm, an upper arm and a hand. The lower arm is configured to be vertically adjustable and rotatable on a vertical axis. The upper arm is pivotably coupled to the lower arm, and the hand is horizontally coupled to the upper arm.

Abstract: A load port of a semiconductor manufacturing apparatus includes a plurality of kinematic coupling pins and a plurality of sensors integrated with the pins. The contacts of the sensors have upper portions that protrude from the pins. Thus, when a cassette is place on the load port, the sensors can reliably sense whether the cassette is resting properly and/or can determine whether the cassette contains wafers. Once such determinations are made in the positive, a command signal is issued that serves to load the wafers into a chamber of the manufacturing apparatus.

Abstract: An apparatus for transferring a container stored with a workpiece (for example, a semiconductor wafer container) between manufacturing stations includes: a manufacturing station that includes a generally horizontal support platform; one or more guides for guiding a vehicle; a vehicle configured to travel on one or more guides to a position below support platform; and a vertical translation unit attached to one of the manufacturing station and the vehicle that vertically translates the container between a lowered position beneath the support platform and a raised position above the support platform. In this configuration, the apparatus can provide a relatively narrow work bay while still allowing sufficient room for a worker. Also, because the vehicle can operate below the level of the manufacturing stations, there is no need for special mounting on the ceiling of the factory.