Abstract: A semiconductor fabrication apparatus, located in an apparatus installation area, includes a front-opening unified pod (FOUP) index, a plate, a first transfer device, a second transfer device, and an engineering FOUP index and multiple processing chambers. The FOUP index can be located in a line, vertically, horizontally, on top, and on bottom. The engineering FOUP index is used for manually locating the FOUP thereon in case of processing irregular single wafers that are not stored in a lot. As the FOUP index is located in the semiconductor fabrication apparatus installed in the apparatus installation area, dead space between the apparatus and air eddies generated above and below the FOUP index can be eliminated to increase the efficiency of working area and improve the environment in fabrication.

Abstract: The present invention relates to a transfer apparatus for a wafer, in which the wafer may be transferred in a narrow space by reducing a transfer device footprint. The transfer device has a base, a lower arm, an upper arm and a hand. The lower arm is configured to be vertically adjustable and rotatable on a vertical axis. The upper arm is pivotably coupled to the lower arm, and the hand is horizontally coupled to the upper arm.

Abstract: A load port of a semiconductor manufacturing apparatus includes a plurality of kinematic coupling pins and a plurality of sensors integrated with the pins. The contacts of the sensors have upper portions that protrude from the pins. Thus, when a cassette is place on the load port, the sensors can reliably sense whether the cassette is resting properly and/or can determine whether the cassette contains wafers. Once such determinations are made in the positive, a command signal is issued that serves to load the wafers into a chamber of the manufacturing apparatus.

Abstract: An apparatus for transferring a container stored with a workpiece (for example, a semiconductor wafer container) between manufacturing stations includes: a manufacturing station that includes a generally horizontal support platform; one or more guides for guiding a vehicle; a vehicle configured to travel on one or more guides to a position below support platform; and a vertical translation unit attached to one of the manufacturing station and the vehicle that vertically translates the container between a lowered position beneath the support platform and a raised position above the support platform. In this configuration, the apparatus can provide a relatively narrow work bay while still allowing sufficient room for a worker. Also, because the vehicle can operate below the level of the manufacturing stations, there is no need for special mounting on the ceiling of the factory.