Patents by Inventor Ki-Tae Ki

Ki-Tae Ki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of loading and/or unloading wafer in semiconductor manufacturing apparatus
    Publication number: 20070281447
    Abstract: In a method of unloading and/or loading a wafer in a semiconductor device manufacturing apparatus, pumping and/or purge operations are performed in a process chamber while the wafer is separated from a susceptor by a desired distance using a plurality of lift pins.
    Type: Application
    Filed: December 13, 2006
    Publication date: December 6, 2007
    Inventors: Hyung-Goo Lee, Ki-Tae Ki, Eui-Hwan Kim, Young-Il Shin, Kwang-Han Lee, Chang-Sik Jun, Kyoung-Hwan Chin, Byung-Chul Choi