Patents by Inventor Ki Chul Um

Ki Chul Um has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 11069510
    Abstract: A plasma supply unit includes a first conductive portion, a second conductive portion having at least a part extending to overlap the first conductive portion, and a ground shield located between the first conductive portion and the second conductive portion, and a substrate processing apparatus including the plasma supply unit.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: July 20, 2021
    Assignee: ASM IP Holding B.V.
    Inventors: Ki Chul Um, Hyun Soo Jang, Jeong Ho Lee, Yong Gyu Han
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20190066978
    Abstract: A plasma supply unit includes a first conductive portion, a second conductive portion having at least a part extending to overlap the first conductive portion, and a ground shield located between the first conductive portion and the second conductive portion, and a substrate processing apparatus including the plasma supply unit.
    Type: Application
    Filed: August 29, 2018
    Publication date: February 28, 2019
    Inventors: Ki Chul Um, Hyun Soo Jang, Jeong Ho Lee, Yong Gyu Han