Abstract: A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.

Abstract: A miniaturized microbial fuel cell is described deriving electrical power from the biological activity of microbes, typically the metabolism of glucose by baker's yeast. Microfabrication techniques are used to miniaturize the components as well as the overall fuel cell and are capable of integration with other biomedical and implantable devices. Substantial reductions in both the size and the cost of implantable systems are thereby achievable. Electrode structures are used that facilitate electron transfer and power production giving favorable power densities in a miniature fuel cell. In addition, the microbial fuel cell of the present invention extracts glucose or other metabolite(s) from the ambient body fluids as its fuel, thus achieving a renewable, long-term power source for implantable biomedical devices.

Abstract: A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.

Abstract: A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.

Abstract: A miniaturized microbial fuel cell is described deriving electrical power from the biological activity of microbes, typically the metabolism of glucose by baker's yeast. Microfabrication techniques are used to miniaturize the components as well as the overall fuel cell and are capable of integration with other biomedical and implantable devices. Substantial reductions in both the size and the cost of implantable systems are thereby achievable. Electrode structures are used that facilitate electron transfer and power production giving favorable power densities in a miniature fuel cell. In addition, the microbial fuel cell of the present invention extracts glucose or other metabolite(s) from the ambient body fluids as its fuel, thus achieving a renewable, long-term power source for implantable biomedical devices.

Abstract: A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.