Abstract: A method in which etching or ashing is conducted by providing satisfactory kinetic energy of reaction seeds such as ions or radicals without damaging a substrate, and an apparatus used in this method are provided. A predetermined film of for example polycrystalline silicon on the substrate is etched in vapor phase using reaction seeds or precursors thereof generated by contacting a reaction gas such as CF4 with a heated catalyst of for example tungsten.

Abstract: A matrix-addressed type liquid crystal display apparatus having switching devices such as TFTs is provided, featuring that an increased effective voltage can be applied without causing hysteresis in V-T characteristics. Namely, by substantially increasing a value of an applicable voltage in excess of which a display defect starts to appear, a high numerical aperture and a high contrast ratio have been achieved at the same time. In the LCD apparatus of the present invention, a gap between adjacent reverse tilt domains each formed in a portion of a pixel which is arranged corresponding to an arbitrary pixel electrode becomes broader than a minimum gap between adjacent pixel electrodes corresponding thereto, or a thickness of a liquid crystal cell in the portion between adjacent reverse tilt domains is set thinner than a thickness of a liquid crystal cell in the portion of the pixel.

Abstract: The invention enables a sufficiently bright color image to be displayed without increasing a heating value with a simple and compact structure which is easily assembled and adjusted. A first microlens for condensing light and a second microlens for changing the travel direction of light are provided, every three pixel electrode parts in a liquid crystal panel. The travel directions of B and G rays condensed by the first microlens are changed by the second microlens, thereby allowing the principal rays to perpendicularly enter the pixel electrode part. The color ray passing through the second microlens focuses on the corresponding pixel electrode part. The first and second microlenses construct a relay optical system having the magnification of 1. Light reflected by the pixel electrode part is transformed by the same first microlens into a parallel ray bundle, and the ray bundle goes out from the liquid crystal panel.

Abstract: A thin film semiconductor device comprising a thin film transistor (TFT) having a thin film semiconductor on an insulation substrate to define an element region, and a hygroscopic interlayer insulating layer which covers said element,a hydrogenation treatment which comprises said interlayer insulating layer provided thereon a capping layer for blocking hydrogen diffusion, so that water entrapped by the interlayer insulating layer may be decomposed to generate hydrogen which is allowed to diffuse into the thin film transistor provided on the side opposite to that of the capping layer.

Abstract: According to a liquid crystal panel of the present invention, the focal length of micro-lenses is set to be longer than the distance between the micro-lens array and the first substrate, while light collected by each micro-lens is arranged to focus inside the first substrate. Thus, the divergence angle after focusing can be reduced. Therefore, the maximum light-emerging angle from the LCD panel can be reduced, and eclipse of the light which causes chrominance or luminance non-uniformity does not occur even when a lens having a high F number is used as a projection lens.

Abstract: A thin film semiconductor device comprising a thin film transistor (TFT) having a thin film semiconductor on an insulation substrate to define an element region, and a hygroscopic interlayer dielectric which covers the element. A hydrogenation treatment which comprises the interlayer dielectric provided thereon a cap film for blocking hydrogen diffusion, so that water entrapped by the interlayer dielectric may be decomposed to generate hydrogen which is allowed to diffuse into the thin film transistor provided on the side opposite to that of the cap film.