Patents by Inventor Kilho Lee

Kilho Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240114700
    Abstract: A semiconductor device includes cell lower conductive lines and peripheral lower conductive lines on a substrate, lower electrode contacts on the cell lower conductive lines, peripheral conductive contacts on the peripheral lower conductive lines, variable resistance patterns horizontally spaced apart from each other on the lower electrode contacts. The lower electrode contacts are respectively connected to the variable resistance patterns. Peripheral conductive lines are horizontally spaced apart from the variable resistance patterns on the peripheral conductive contacts. The peripheral conductive contacts are connected to the peripheral conductive lines. The cell and peripheral lower conductive lines are connected to the lower electrode contacts and the peripheral conductive contacts, respectively. The cell and peripheral lower conductive lines are at the same height.
    Type: Application
    Filed: August 11, 2023
    Publication date: April 4, 2024
    Inventors: Yongjae LEE, Seung Pil KO, Kilho LEE, Jeongjin LEE
  • Publication number: 20230217835
    Abstract: A method of manufacturing a memory device includes sequentially forming a first magnetization layer, a tunnel barrier layer, and a second magnetization layer on each other; forming a magnetic tunnel junction structure by patterning the first magnetization layer, the tunnel barrier layer, and the second magnetization layer; forming a sidewall metal layer by etching a portion of a redeposited metal covering a sidewall of the magnetic tunnel junction structure; performing an oxidizing operation that includes oxidizing an exposed surface of the sidewall metal layer to provide an oxidized sidewall metal layer; and performing an irradiating operation that includes irradiating an ion beam towards the oxidized sidewall metal layer. A sidewall insulating layer covering a sidewall of the magnetic tunnel junction structure is formed by alternately performing the oxidizing operation and the irradiating operation two or more times.
    Type: Application
    Filed: December 22, 2022
    Publication date: July 6, 2023
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Manjin EOM, Gawon LEE, Seungpil KO, Kilho LEE
  • Patent number: 11665910
    Abstract: A magnetic memory device includes a magnetic tunnel junction pattern on a substrate, a first conductive pattern between the substrate and the magnetic tunnel junction pattern, lower contact plugs between the first conductive pattern and the substrate and disposed at respective sides of the magnetic tunnel junction pattern, and second conductive patterns on the lower contact plugs, respectively. The second conductive patterns connect the lower contact plugs to the first conductive pattern. The second conductive patterns include a ferromagnetic material.
    Type: Grant
    Filed: December 9, 2021
    Date of Patent: May 30, 2023
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Patent number: 11659719
    Abstract: A semiconductor device including a substrate that has a first region and a second region, a plurality of lower conductive patterns on the substrate, the plurality of lower conductive patterns including a first conductive pattern in the first region of the substrate and a second conductive pattern in the second region of the substrate, a magnetic tunnel junction on the first conductive pattern, a contact between the magnetic tunnel junction and the first conductive pattern, a through electrode on the second conductive pattern, and a plurality of upper conductive patterns on the magnetic tunnel junction and the through electrode. The contact includes a first contact on the lower conductive patterns, a second contact on the first contact, and a first barrier layer that covers a bottom surface and a lateral surface of the second contact.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: May 23, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Patent number: 11557631
    Abstract: Disclosed is a semiconductor device including first conductive lines, second conductive lines crossing the first conductive lines, and memory cells at intersections between the first conductive lines and the second conductive lines. Each of the memory cells includes a magnetic tunnel junction pattern, a bi-directional switching pattern connected in series to the magnetic tunnel junction pattern, and a conductive pattern between the magnetic tunnel junction pattern and the bi-directional switching pattern.
    Type: Grant
    Filed: November 3, 2020
    Date of Patent: January 17, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kilho Lee, Gwanhyeob Koh, Ilmok Park, Junhee Lim
  • Publication number: 20220328083
    Abstract: A magnetic memory device may include a substrate including a first region and a second region, a first interlayer insulating layer on the substrate, a first capping layer on the first interlayer insulating layer, the first capping layer covering the first and second regions of the substrate, a second interlayer insulating layer on a portion of the first capping layer covering the first region of the substrate, a bottom electrode contact included in the second interlayer insulating layer, a magnetic tunnel junction pattern on the bottom electrode contact, and a second capping layer on the second interlayer insulating layer, the second capping layer being in contact with the first capping layer on the second region of the substrate.
    Type: Application
    Filed: November 30, 2021
    Publication date: October 13, 2022
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Seung Pil KO, Yongjae KIM, Geonhee BAE, Gawon LEE, Kilho LEE
  • Patent number: 11437432
    Abstract: An embedded device includes a first insulation layer, a second insulation layer on the first insulation layer, a lower electrode contact in the first insulation layer in a first region, a first structure, having a lower electrode, a magnetic tunnel junction, and an upper electrode, in the second insulation layer and contacting the lower electrode contact, a first metal wiring structure through the first and second insulation layers in a second region, a third insulation layer on the second insulation layer, a bit line structure through the third insulation layer and the second insulation layer in the first region, the bit line structure having a first height and contacting the upper electrode, and a second metal wiring structure through the third insulation layer in the second region, the second metal wiring structure contacting the first metal wiring structure, and having a second height lower than the first height.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: September 6, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kilho Lee, Gwanhyeob Koh, Woojin Kim
  • Patent number: 11361798
    Abstract: A first memory section is disposed on a substrate. A second memory section is vertically stacked on the first memory section. The first memory section is provided between the substrate and the second memory section. The first memory section includes a flash memory cell structure, and the second memory section includes a variable resistance memory cell structure. The flash memory cell structure includes at least one cell string comprising a plurality of first memory cells connected in series to each other and a bit line on the substrate connected to the at least one cell string. The bit line is interposed vertically between the at least one cell string and the second memory section and connected to the second memory section.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: June 14, 2022
    Inventors: Kilho Lee, Gwanhyeob Koh, Junhee Lim, Hongsoo Kim, Chang-hoon Jeon
  • Publication number: 20220102426
    Abstract: A magnetic memory device includes a magnetic tunnel junction pattern on a substrate, a first conductive pattern between the substrate and the magnetic tunnel junction pattern, lower contact plugs between the first conductive pattern and the substrate and disposed at respective sides of the magnetic tunnel junction pattern, and second conductive patterns on the lower contact plugs, respectively. The second conductive patterns connect the lower contact plugs to the first conductive pattern. The second conductive patterns include a ferromagnetic material.
    Type: Application
    Filed: December 9, 2021
    Publication date: March 31, 2022
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Patent number: 11211425
    Abstract: A magnetic memory device includes a magnetic tunnel junction pattern on a substrate, a first conductive pattern between the substrate and the magnetic tunnel junction pattern, lower contact plugs between the first conductive pattern and the substrate and disposed at respective sides of the magnetic tunnel junction pattern, and second conductive patterns on the lower contact plugs, respectively. The second conductive patterns connect the lower contact plugs to the first conductive pattern. The second conductive patterns include a ferromagnetic material.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: December 28, 2021
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Publication number: 20210351233
    Abstract: A semiconductor device including a substrate that has a first region and a second region, a plurality of lower conductive patterns on the substrate, the plurality of lower conductive patterns including a first conductive pattern in the first region of the substrate and a second conductive pattern in the second region of the substrate, a magnetic tunnel junction on the first conductive pattern, a contact between the magnetic tunnel junction and the first conductive pattern, a through electrode on the second conductive pattern, and a plurality of upper conductive patterns on the magnetic tunnel junction and the through electrode. The contact includes a first contact on the lower conductive patterns, a second contact on the first contact, and a first barrier layer that covers a bottom surface and a lateral surface of the second contact.
    Type: Application
    Filed: July 21, 2021
    Publication date: November 11, 2021
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Patent number: 11121175
    Abstract: A semiconductor device including a substrate that has a first region and a second region, a plurality of lower conductive patterns on the substrate, the plurality of lower conductive patterns including a first conductive pattern in the first region of the substrate and a second conductive pattern in the second region of the substrate, a magnetic tunnel junction on the first conductive pattern, a contact between the magnetic tunnel junction and the first conductive pattern, a through electrode on the second conductive pattern, and a plurality of upper conductive patterns on the magnetic tunnel junction and the through electrode. The contact includes a first contact on the lower conductive patterns, a second contact on the first contact, and a first barrier layer that covers a bottom surface and a lateral surface of the second contact.
    Type: Grant
    Filed: April 14, 2020
    Date of Patent: September 14, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Publication number: 20210257404
    Abstract: An embedded device includes a first insulation layer, a second insulation layer on the first insulation layer, a lower electrode contact in the first insulation layer in a first region, a first structure, having a lower electrode, a magnetic tunnel junction, and an upper electrode, in the second insulation layer and contacting the lower electrode contact, a first metal wiring structure through the first and second insulation layers in a second region, a third insulation layer on the second insulation layer, a bit line structure through the third insulation layer and the second insulation layer in the first region, the bit line structure having a first height and contacting the upper electrode, and a second metal wiring structure through the third insulation layer in the second region, the second metal wiring structure contacting the first metal wiring structure, and having a second height lower than the first height.
    Type: Application
    Filed: September 22, 2020
    Publication date: August 19, 2021
    Inventors: Kilho LEE, Gwanhyeob KOH, Woojin KIM
  • Publication number: 20210151502
    Abstract: A magnetoresistive random access memory device including a first insulating interlayer on a substrate; lower electrode contacts passing through the first insulating interlayer; first structures on the lower electrode contacts, respectively, each of the first structures including a stacked lower electrode, magnetic tunnel junction (MTJ) structure, and upper electrode; a second insulating interlayer on the first structures and the first insulating interlayer, the second insulating interlayer filling a space between the first structures; a third insulating interlayer directly contacting the second insulating interlayer, the third insulating interlayer having a dielectric constant lower than a dielectric constant of the second insulating interlayer; and a bit line passing through the third insulating interlayer and the second insulating interlayer, the bit line contacting the upper electrode of one of the first structures.
    Type: Application
    Filed: June 4, 2020
    Publication date: May 20, 2021
    Inventors: Woojin KIM, Yongjae KIM, Kilho LEE
  • Publication number: 20210134884
    Abstract: Disclosed is a semiconductor device including first conductive lines, second conductive lines crossing the first conductive lines, and memory cells at intersections between the first conductive lines and the second conductive lines. Each of the memory cells includes a magnetic tunnel junction pattern, a bi-directional switching pattern connected in series to the magnetic tunnel junction pattern, and a conductive pattern between the magnetic tunnel junction pattern and the bi-directional switching pattern.
    Type: Application
    Filed: November 3, 2020
    Publication date: May 6, 2021
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Kilho LEE, Gwanhyeob KOH, Ilmok PARK, Junhee LIM
  • Publication number: 20210104575
    Abstract: A semiconductor device including a substrate that has a first region and a second region, a plurality of lower conductive patterns on the substrate, the plurality of lower conductive patterns including a first conductive pattern in the first region of the substrate and a second conductive pattern in the second region of the substrate, a magnetic tunnel junction on the first conductive pattern, a contact between the magnetic tunnel junction and the first conductive pattern, a through electrode on the second conductive pattern, and a plurality of upper conductive patterns on the magnetic tunnel junction and the through electrode. The contact includes a first contact on the lower conductive patterns, a second contact on the first contact, and a first barrier layer that covers a bottom surface and a lateral surface of the second contact.
    Type: Application
    Filed: April 14, 2020
    Publication date: April 8, 2021
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Kilho LEE, Gwanhyeob KOH
  • Publication number: 20210082998
    Abstract: A magnetic memory device includes a magnetic tunnel junction pattern on a substrate, a first conductive pattern between the substrate and the magnetic tunnel junction pattern, lower contact plugs between the first conductive pattern and the substrate and disposed at respective sides of the magnetic tunnel junction pattern, and second conductive patterns on the lower contact plugs, respectively. The second conductive patterns connect the lower contact plugs to the first conductive pattern. The second conductive patterns include a ferromagnetic material.
    Type: Application
    Filed: June 8, 2020
    Publication date: March 18, 2021
    Inventors: Kilho Lee, Gwanhyeob Koh
  • Patent number: 10897006
    Abstract: A magnetic memory device including a substrate including a cell region and a peripheral circuit region; a first interlayer insulating layer covering the cell region and the peripheral circuit region of the substrate; interconnection lines in the first interlayer insulating layer; a peripheral conductive line and a peripheral conductive contact on the first interlayer insulating layer on the peripheral circuit region, the peripheral conductive contact being between the peripheral conductive line and a corresponding one of the interconnection lines; a bottom electrode contact on the first interlayer insulating layer on the cell region and connected to a corresponding one of the interconnection lines; and a data storage pattern on the bottom electrode contact, wherein the peripheral conductive line is at a height between a top surface of the bottom electrode contact and a bottom surface of the bottom electrode contact.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: January 19, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kilho Lee, Gwanhyeob Koh, Yongjae Kim, Yoonjong Song
  • Patent number: 10861902
    Abstract: A semiconductor device includes first conductive lines, second conductive lines crossing the first conductive lines, and memory cells at intersections between the first conductive lines and the second conductive lines. Each of the memory cells includes a magnetic tunnel junction pattern, a bi-directional switching pattern connected in series to the magnetic tunnel junction pattern, and a conductive pattern between the magnetic tunnel junction pattern and the bi-directional switching pattern.
    Type: Grant
    Filed: June 16, 2018
    Date of Patent: December 8, 2020
    Inventors: Kilho Lee, Gwanhyeob Koh, Ilmok Park, Junhee Lim
  • Patent number: 10693055
    Abstract: Magnetic random access memory (MRAM) devices are provided. The MRAM devices may include a magnetic tunnel junction (MTJ) including a free layer and a pinned layer sequentially stacked in a vertical direction and a conductive layer adjacent to the free layer of the MTJ. The conductive layer may include a horizontal portion and first and second protruding portions that protrude away from the horizontal portion and are spaced apart from each other in a horizontal direction that is perpendicular to the vertical direction. A side of the free layer and a side of the horizontal portion may form a straight side.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: June 23, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kilho Lee, Gwanhyeob Koh, Yoonjong Song