Abstract: A lower module of a power electronic device includes a lower module included in a power electronic device that is divided into an upper module and a lower module by an intermediate plate and comprises a blower fan to introduce air into the inner space of the lower module; a plurality of capacitors installed in a suspended form on the intermediate plate and spaced apart from the blower fan; a heat sink having a plurality of heat dissipation fins through which heat generated from a heating component disposed on the upper module is conducted, and disposed adjacent to the capacitors to cool the plurality of heat dissipation fins by air moved from the plurality of capacitors; a DC reactor cooled by the air moved from the heat dissipation fins; and a discharge plate having a vent hole to discharge the air moved from the DC reactor to the outside.

Abstract: A developer flow check system is capable of directly determining the actual amount of developer from a nozzle. The system includes: a pressure regulator; a reservoir connected to the pressure regulator; a valve connected to the reservoir; a developer nozzle connected to the valve; and a post nozzle developer flow check section connected to the developer nozzle, for adjusting the quantity of the developer actually injected to an wafer to conform to a preset quantity is developer. The post nozzle developer flow check section includes: a developer flow check tube arranged for receiving the developer delivered from said developer nozzle. A sensor detects movement of said display a developer flow controller connected to said sensor determines a time interval which developer flows through the tube and the quantity of developer is calculated thereby. a developer flow check system controller receiving a control signal from the developer flow controller, to control the actual developer flow.