Patents by Inventor Killian Schmidt

Killian Schmidt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND A SYSTEM FOR AUTOMATIC GENERATION OF THROUGHPUT MODELS FOR SEMICONDUCTOR TOOLS
    Publication number: 20120130523
    Abstract: The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messages with high statistical relevance.
    Type: Application
    Filed: January 20, 2012
    Publication date: May 24, 2012
    Inventors: Killian Schmidt, Roy Boerner, Jan Lange