Patents by Inventor Kim Kyeun

Kim Kyeun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and method of forming the same
    Publication number: 20070069387
    Abstract: Provided is a method of forming a contact hole. The method includes: depositing an interlayer insulating layer on a semiconductor substrate on which a dummy region and an active region are defined; coating a photoresist film on the interlayer insulating layer; patterning the photoresist film using a mask having a light transmission region, a partial light transmission region and a light shielding region; and etching the patterned photoresist film and the interlayer insulating layer to form a contact hole at the active region and a dummy contact hole at the dummy region.
    Type: Application
    Filed: September 26, 2006
    Publication date: March 29, 2007
    Inventor: Kim Kyeun