Abstract: A method and apparatus for measuring the rate of flow of an ion-containing fluid in a channel are disclosed herein. The apparatus includes a captive sensor operable to detect changes in capacitance value due to the deflection of the ions in the fluid by a magnetic field, and a processor operable to determine a flow speed of fluid from the detected change in capacitance value and a predetermined value of magnetic field strength. Such apparatus may be implemented using CMOS technology. The apparatus may operate in a magnetic field generated by a permanent magnet and measure the flow reliably.

Abstract: A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.

Abstract: There is disclosed a method of predicting an ambient temperature around a mobile device, wherein: a primary temperature sensor comprised in said mobile device measures a first temperature value; at least one secondary temperature sensor comprised in said mobile device measures a second temperature value; a processing unit comprised in said mobile device calculates a first prediction of an ambient temperature around the mobile device in dependence on the first temperature value and at least one parameter which is indicative of a thermal influence of one or more mobile device components on the measurements; the processing unit calculates a second prediction of said ambient temperature in dependence on the second temperature value and said parameter; the processing unit compares the first prediction with the second prediction and adjusts said parameter if the difference between the first prediction and the second prediction exceeds a predefined maximum.

Abstract: There is disclosed a method of operating a mobile device, wherein: a temperature sensor comprised in said mobile device measures, at a first time instant, an initial temperature value; the temperature sensor measures, at a second time instant, a current temperature value; a processing unit comprised in said mobile device calculates an ambient temperature around the mobile device in dependence on the initial temperature value, the current temperature value and at least one further value which is indicative of a thermal influence of a mobile device component on the temperature sensor. Furthermore, a corresponding computer program product is disclosed, as well as a corresponding mobile device.

Abstract: The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated. A first approach splits the frequency of the loop into two distinct components, an actuation frequency and a detection frequency. A second approach modifies the design of the MEMS resonator such that the actuation signal follows a different path through the MEMS resonator than the detection signal.

Abstract: The present invention concerns a detection system and a corresponding method for detecting movements of a movable object that compensate for unintentional tilt movement of the movable object in a first direction and/or in a second direction when a linear movement in a third direction is detected.

Abstract: An apparatus for misalignment compensation in optical joysticks is described. The optical joystick includes a light source, a plurality of photodetectors, and circuitry for controlling operation of the optical joystick. In some embodiments, each of the photodetectors may partitioned into a plurality of photodetector elements and select photodetector elements are configured to be individually activated in order to cause an electrical shifting of the selected photodetector elements to achieve a different operational alignment position of optical components of the optical joystick. In some embodiments, the light source may be similarly be calibrated by individually activating portions of a light-source array to cause an electrical shift. Various other embodiments and methods of operation are also described.

Abstract: Flow sensors for measuring the flow of an ion-containing fluid may be implemented using mechanical or electrical techniques. Mechanical flow sensors are have moving parts and therefore may be unreliable after some time and are expensive to manufacture. Hall-effect type flow sensors typically require a reversible magnetic field to compensate for electrochemical effects. A flow meter including such a sensor uses an electromagnet. A flow sensor (100) is described using a capacitive sensor (10) and processor (12) to determine the flow rate from a change in capacitance and a magnetic field. Such a flow sensor may be implemented using CMOS technology. The flow sensor may operate in a magnetic field generated by a permanent magnet and measure the flow reliably.

Abstract: The present invention relates to a detection system for the detection of movements of a movable object. The detection system may comprises: a light emitting device (S) for emitting light, a reflecting unit (5) being arranged in functional connection with the movable object and being adapted for reflecting the emitted light, a plurality of detectors (D1 to D4) for detecting the reflected light and outputting detection signals for determining a movement of the movable object. When reflecting the emitted light, the reflecting unit causes a light spot to be incident on the plurality of detectors, and the plurality of detectors are arranged in a predetermined manner so as to be located completely inside the light spot irrespective of any movement of the movable object. The present invention further relates to a method of detecting movements of the movable object, and an IC having implemented therein the detection system.

Abstract: A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.

Abstract: A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.

Abstract: A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.

Abstract: A frequency selection device comprises an oscillator, which comprises a resonator mass which is connected by a spring arrangement to a substrate, and a piezoresistive element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected to the resonator mass. A current is driven through the piezoresistive element to control oscillation of the resonator mass. An input is provided for coupling a signal from which a desired frequency range is to be selected, to the resonator mass; and a detector is used for detecting a signal amplified by the oscillator.

Abstract: The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated. A first approach splits the frequency of the loop into two distinct components, an actuation frequency and a detection frequency. A second approach modifies the design of the MEMS resonator such that the actuation signal follows a different path through the MEMS resonator than the detection signal.

Abstract: An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.

Abstract: A magnetoresistive sensor comprising first and second magnetoresistive elements is disclosed. Each magnetoresistive element is coupled at a respective first end to a common ground terminal and comprises one or more magnetoresistive segments, each overlying a corresponding segment of an excitation coil. The resistance of the magnetoresistive segments in each of the first and second magnetoresistive elements is the same and the resistance of the segments of the excitation coil corresponding to the first magnetoresistive element is the same as the resistance of the segments of the excitation coil corresponding to the second magnetoresistive element.

Abstract: A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (8), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (8), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal (82) or a reading (94) of the sense current (22), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator (62) may be located in the vicinity of the resonator (8) for compensating purposes.

Abstract: A device has a micro electromechanical structure (10) with a first arm (102), at least one second arm (104a, b) connected to each other via a connection (100). Both arms (102, 104a, b) and the connection (100) are preferably made of a single crystalline body. The first and second arm (102, 104a, b) have end portions attached to a substrate, but otherwise the arms and their connection are free to move relative to the substrate. The first and second arm (102, 104a, b) extending from the end portions to the connection (100) along different directions, preferably perpendicularly to each other. An electrode (12) is provided on the substrate, adjacent to the micro electromechanical structure (10) to excite vibration of the structure. The two arms in different directions make it possible to reduce the nonlinearity of the stiffness during vibrations of the structure.

Abstract: A novel Si MEMS piezoresistive resonator is described. The resonator has a shape of a frame, such as a ring or a polygon frame, which has two or more anchors. Electrodes located at the outer or inner rim of the resonant structure are used to excite the structure electrostatically into resonance with a desired mode shape. One or plurality of locally doped regions on the structure is used for piezoresistive readout of the signal. In the most preferred embodiments, the structure is a ring, which has four anchors, two electrodes and four piezoresistive regions at different segments of the structure. The piezoresistive regions are alternatively located at the outer rim and inner rim of the structure in such a way that the piezoresistive signals of the same sign from different regions can be collected. Advantages of this device are large readout signal, large electrode area, robustness, suppressed out-of-plane vibration and larger usable linear range.

Abstract: The optical pointing device of the present invention comprises a base and an actuator movable connected to the base, wherein the actuator comprises a reflective portion on a side facing the base, and wherein the base comprises a light source for emitting light towards the reflective portion of the actuator, a detector comprising one of more detection units for detecting at least a part of the light reflected by the reflective portion of the actuator, and a transparent element arranged between the actuator and at least one of the light source and the detection units, for providing a closed transparent housing for the light source and/or the detection units.