Patents by Inventor Kim Vu Luong

Kim Vu Luong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10782607
    Abstract: An example method for making a reticle includes providing an assembly. The assembly includes an extreme ultraviolet mirror and a cavity overlaying at least a bottom part of the extreme ultraviolet mirror. The method also includes at least partially filling the cavity with an extreme ultraviolet absorbing structure that includes a metallic material that includes an element selected from Ni, Co, Sb, Ag, In, and Sn, by forming the extreme ultraviolet absorbing structure selectively in the cavity.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: September 22, 2020
    Assignees: IMEC VZW, KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D
    Inventors: Boon Teik Chan, Kim Vu Luong, Vicky Philipsen, Efrain Altamirano Sanchez, Kevin Vandersmissen
  • Patent number: 10731234
    Abstract: Example embodiments relate to extreme ultraviolet absorbing alloys. One example embodiment includes an alloy. The alloy includes one or more first elements selected from: a first list consisting of: Ag, Ni, Co, and Fe; and a second list consisting of: Ru, Rh, Pd, Os, Ir, and Pt. The alloy also includes one or more second elements selected from: the first list, if the one or more first elements are not selected from the first list; and a third list consisting of Sb and Te. An atomic ratio between the one or more first elements and the one or more second elements is between 1:1 and 1:5 if the one or more second elements are selected from the third list and between 1:1 and 1:19 if the one or more second elements are not selected from the third list.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: August 4, 2020
    Assignees: IMEC VZW, Katholieke Universiteit Leuven, KU LEUVEN R&D
    Inventors: Hanns Christoph Adelmann, Vicky Philipsen, Kim Vu Luong
  • Publication number: 20190078177
    Abstract: Example embodiments relate to extreme ultraviolet absorbing alloys. One example embodiment includes an alloy. The alloy includes one or more first elements selected from: a first list consisting of: Ag, Ni, Co, and Fe; and a second list consisting of: Ru, Rh, Pd, Os, Ir, and Pt. The alloy also includes one or more second elements selected from: the first list, if the one or more first elements are not selected from the first list; and a third list consisting of Sb and Te. An atomic ratio between the one or more first elements and the one or more second elements is between 1:1 and 1:5 if the one or more second elements are selected from the third list and between 1:1 and 1:19 if the one or more second elements are not selected from the third list.
    Type: Application
    Filed: August 21, 2018
    Publication date: March 14, 2019
    Applicants: IMEC VZW, Katholieke Universiteit Leuven, KU LEUVEN R&D
    Inventors: Hanns Christoph Adelmann, Vicky Philipsen, Kim Vu Luong
  • Publication number: 20190079384
    Abstract: An example method for making a reticle includes providing an assembly. The assembly includes an extreme ultraviolet mirror and a cavity overlaying at least a bottom part of the extreme ultraviolet mirror. The method also includes at least partially filling the cavity with an extreme ultraviolet absorbing structure that includes a metallic material that includes an element selected from Ni, Co, Sb, Ag, In, and Sn, by forming the extreme ultraviolet absorbing structure selectively in the cavity.
    Type: Application
    Filed: September 6, 2018
    Publication date: March 14, 2019
    Applicants: IMEC VZW, Katholieke Universiteit Leuven, KU LEUVEN R&D
    Inventors: Boon Teik Chan, Kim Vu Luong, Vicky Philipsen, Efrain Altamirano Sanchez, Kevin Vandersmissen