Patents by Inventor Kimberley A. Kaufman

Kimberley A. Kaufman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching method
    Patent number: 6406640
    Abstract: The present invention relates to a method of plasma etching and a method of operating a plasma etching apparatus in which a concentration of oxygen at flash striking is greater than a concentration during etching.
    Type: Grant
    Filed: April 10, 2000
    Date of Patent: June 18, 2002
    Assignee: Cypress Semiconductor Corporation
    Inventors: Chan-lon Yang, Usha Raghuram, Kimberley A. Kaufman, Daniel Arnzen, James Nulty
  • Plasma etching method
    Patent number: 6165375
    Abstract: The present invention relates to a method of plasma etching and a method of operating a plasma etching apparatus.
    Type: Grant
    Filed: September 23, 1997
    Date of Patent: December 26, 2000
    Assignee: Cypress Semiconductor Corporation
    Inventors: Chan-lon Yang, Usha Raghuram, Kimberley A. Kaufman, Daniel Arnzen, James Nulty