Abstract: In the case of drawing an oblique figure pattern, when drawing an oblique figure by using a slender rectangular beam, a problem occurs that edge roughness occurs at an oblique-side portion to deteriorate the drawing accuracy. The present invention solves the above problem and provides an electron-beam drawing apparatus and an electron-beam drawing method capable of accurately drawing even an oblique figure.

Abstract: One code is generated by combining (including addition) 2 or more codes, correlation detection method which detects the correlation by multiplying such a generated code by the reception data. In communication system based on W-CDMA method, first spreading code (a·Cp) obtained by multiplying primary synchronization code with a predetermined coefficient and second spreading code (a·Cs) obtained by multiplying secondary synchronization code with a predetermined coefficient are added. Then, the third spreading code (a·Cp+a·Cs) obtained from such an addition is multiplied by the reception data, and correlation value is obtained after integrating the multiplication results. Thus, it is determined whether the reception data has been subjected to STTD diversity.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is radiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with: the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: An amplitude detecting circuit (1) includes a simple digital filter (2) having a structure corresponding to a part where the energy is concentrated in the full impulse response of a signal processing digital filter (3). Concretely, for example, the amplitude detecting circuit (1) (simple digital filter (2)) includes only four central taps having coefficients of large absolute values and considerably affecting on the output amplitude among sixteen taps of the signal processing digital filter (3). By the amplitude detecting circuit (1), the amplitude of an output signal of the signal processing digital filter (3) can approximately be detected.

Abstract: The present invention provides an electron beam exposure method and an exposure apparatus suitable for use in the electron beam exposure technology for performing exposure on a sample placed on a sample table by an electron beam while continuously moving the sample table, both of which are capable of performing high-accuracy and high-speed exposure without being affected by glitch noise of a DA converter used for trace deflection of the electron beam. Displacements of the position of the sample table and the position to apply the electron beam are determined and the determined displacements are divided into the amount of a shot synchronous trace and the amount of a real time trace each synchronized with shot timing for applying the electron beam to thereby reduce the amount of the real time trace, whereby degradation in exposure accuracy due to the glitch noise of the DA converter used for trace deflection is prevented from occurring. It is therefore possible to carry out high-accuracy exposure.

Abstract: The pattern line width of a coil is partially widened in a predetermined dimension and wiring patterns of a coil on the surface side and a coil on the rear side are arranged so as not to be in overlapped positions. Consequently, a direct current resistance of the coil can be reduced and an adverse influence by a self resonance of the coil on a communication can be reduced.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is radiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: A reader/writer (RW) requires identification information pieces of respective plural IC cards (A, B, C). The plural IC cards return the respective identification information pieces in response to the requirement by the reader/writer. Logical addresses are assigned to some IC cards among the plural IC cards respectively to cause the reader/writer to select them in response to the return of the identification information pieces by the plural IC cards. The IC cards selected by the reader/writer are controlled. The reader/writer cancels the assignment of the logical address to one of the selected IC cards. The logical address, the assignment of which has been canceled by the reader/writer, is assigned to an IC card among the plural IC cards to which any logical address has not been assigned yet. The IC card to which the logical address has just been assigned is controlled.

Abstract: In the case of drawing an oblique figure pattern, when drawing an oblique figure by using a slender rectangular beam, a problem occurs that edge roughness occurs at an oblique-side portion to deteriorate the drawing accuracy. The present invention solves the above problem and provides an electron-beam drawing apparatus and an electron-beam drawing method capable of accurately drawing even an oblique figure.

Abstract: An amplitude detecting circuit (1) comprises a simple digital filter (2) having a structure corresponding to a part where the energy is concentrated in the full impulse response of a signal processing digital filter (3). Concretely, for example, the amplitude detecting circuit (1) (simple digital filter (2)) comprises only four central taps having coefficients of large absolute values and considerably affecting on the output amplitude among sixteen taps of the signal processing digital filter (3). By the amplitude detecting circuit (1), the amplitude of an output signal of the signal processing digital filter (3) can approximately be detected.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: A reader/writer (RW) requires identification information pieces of respective plural IC cards (A, B, C). The plural IC cards return the respective identification information pieces in response to the requirement by the reader/writer. Logical addresses are assigned to some IC cards among the plural IC cards respectively to cause the reader/writer to select them in response to the return of the identification information pieces by the plural IC cards. The IC cards selected by the reader/writer are controlled. The reader/writer cancels the assignment of the logical address to one of the selected IC cards. The logical address, the assignment of which has been canceled by the reader/writer, is assigned to an IC card among the plural IC cards to which any logical address has not been assigned yet. The IC card to which the logical address has just been assigned is controlled.

Abstract: The pilot signal reception method of the present invention irregularly receives pilot symbols. That is, the pilot signal reception method performs irregular reception processing such as randomizing reception timings or changing reception timings according to reception situations as appropriate to reduce influences of fading. Randomization of reception timings is implemented by generating random timings using a random timing generation circuit.

Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

Abstract: The pattern line width of a coil is partially widened in a predetermined dimension and wiring patterns of a coil on the surface side and a coil on the rear side are arranged so as not to be in overlapped positions. Consequently, a direct current resistance of the coil can be reduced and an adverse influence by a self resonance of the coil on a communication can be reduced.

Abstract: A cell signal processing circuit is provided which is capable of precisely extracting a timing signal and a cell synchronizing signal. The cell signal processing circuit is principally composed of a signal adder circuit for adding a dummy signal comprising bit signals in a direct current balanced state to an end portion of respective inputted time series cell signals, and a separator circuit for separating and outputting the time series cell signals. Each dummy signal being composed of the same number of bits "0" and "1" is added to input signals in the form of time series cells such that signal cells are exchanged at a time of a bit "0" in the dummy signal.

Abstract: An electron beam lithography system having a contour resolving circuit for resolving original pattern data which is transferred from a host computer into contour portion pattern data and inner portion pattern data in accordance with the designated dimension, for adding flag data to enable the contour portion pattern data and the inner portion pattern data to be discriminated to the resolved pattern data, and for outputting the resolved pattern data with the flag data. By adding the flag data, the contour portion pattern data and inner portion pattern data can be easily discriminated. The operation to change the electron beam irradiation dose in accordance with the contour portion pattern and inner portion pattern can be fairly easily executed. A pattern can be drawn at a high accuracy while preventing a deformation of the drawn figure due to the proximity effect. A data processing amount in the computer can be reduced. A data transfer amount from the host computer can be also reduced.

Abstract: A lithography apparatus in which a charged particle ray such as an electron beam or an ion beam is controlled to scan a desired region of a sample and thereby draw a pattern, including a framing pattern memory for storing therein closed framing lines of a pattern to be drawn in the form of dot images, a framing pattern generator for writing the framing lines of the pattern to be drawn into said framing pattern memory in the form of dot images, and a raster scanning circuit for scanning the framing pattern memory having stored therein closed framing lines of the pattern to be drawn and for generating a beam deflection address for drawing the pattern and a beam blanking control signal.

Abstract: A floating-point data processing apparatus operates to generate exponent data of fixed length from floating-point data composed of (a) a sign bit indicating a mantissa sign, (b) a first exponent part which has bit length determined in dependence upon a significant bit length necessary for binary expression of an exponent and which has all its bits determined at 1 or 0 in dependence upon the mantissa sign and the sign of said exponent, (c) a second exponent part which has its bit length determined in dependence upon the bit length of the first exponent part, which has a predetermined relationship determined in dependence upon the sign of the exponent and the mantissa sign with the significant bit part when the exponent is expressed in binary form, and the leading bit of which has a value different from the value of one bit of said first exponent part, and (d) a mantisa part which has a plurality of bits having a bit length determined in dependence upon the value of the exponent.