Abstract: An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light.

Abstract: To make it possible to alter a cell length with reduction of a manufacturing cost so that a spacer can be securely positioned at a desired position, a cell includes: a pair of optical windows sandwiching a flow channel; a cell body provided with an accommodating recess and a solution introduction part and a solution deriving part; a pair of light transmitting members in the accommodating recess and forming the pair of optical windows; a spacer defining a distance between the opposing surfaces of the pair of light transmitting members; and a pressing mechanism for pressing the light transmitting members and the spacer toward the bottom surface of the accommodating recess so as to form the flow channel, wherein a positioning recess having a shape corresponding to the spacer is provided on at least one of the opposing surfaces and the spacer is fitted therein.

Abstract: In a sample cell that is sealed with an X-ray transmission sheet after a sample such as a liquid fuel or the like is contained therein, when an internal pressure is increased, a cup end surface is deformed so as to increase an internal capacity of the sample cell before the X-ray transmission sheet serving as a window part is expanded. The cup end surface is formed by folding a film-like material and, when the internal pressure of the sample cell is increased, the cup end surface is unfolded outwardly of the sample cell to increase the internal capacity of the sample cell. The increase in pressure is relieved by the increase in capacity, and the expansion of the X-ray transmission sheet is thereby prevented.

Abstract: This invention is to make the detection sensitivities as even as possible among a plurality of specimens to be inspected in an analyzer that leads light transmitted from the plurality of specimens to be inspected to a single spectrometer via optical fibers, the analyzer includes first and second light guide members provided for every first and second specimen to be inspected so as to lead the light obtained from each of the specimens to be inspected to a photo-detecting part, and light projection side end portions of a plurality of optical fiber elements composing the first and second light guide members are arranged in mixture.

Abstract: The present invention may improve an accuracy of a carried position of a semiconductor wafer W to a loading board. The vibration isolation system may be characterized by comprising a base, a loading board that loads a wafer stage on which a semiconductor wafer W is placed, a spring element that is arranged on the base and that supports the loading board and isolates the loading board from a source of vibration, and a positioning mechanism that nullifies the vibration isolation effect of the spring element and that positions the loading board at a predetermined position to the base at a time of placing the semiconductor wafer W on the wafer stage.

Abstract: The present invention provides a method and substrate examining device that sequentially and automatically measures at least the thickness and the internal stress of the thin film at a predetermined measurement point on the surface of every manufactured semiconductor substrate to perform quality control on each substrate, and reliably recognizes the cause of defects to improve productivity. The examining device and method accurately analyzes the correlation between film thickness and stress to establish the manufacturing processes necessary for manufacturing a semiconductor substrate of higher performance, and measures the distribution of a physical quantity such as internal stress, index of refraction, and composition of the semiconductor substrate in the film thickness direction, without being influenced by change in ambient environmental temperature thereby further improving examination precision.

Abstract: The present invention provides a method and substrate examining device that sequentially and automatically measures at least the thickness and the internal stress of the thin film at a predetermined measurement point on the surface of every manufactured semiconductor substrate to perform quality control on each substrate, and reliably recognizes the cause of defects to improve productivity. The examining device and method accurately analyzes the correlation between film thickness and stress to establish the manufacturing processes necessary for manufacturing a semiconductor substrate of higher performance, and measures the distribution of a physical quantity such as internal stress, index of refraction, and composition of the semiconductor substrate in the film thickness direction, without being influenced by change in ambient environmental temperature thereby further improving examination precision.