Patents by Inventor Kimiko Hachiya, legal representative

Kimiko Hachiya, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection apparatus and inspection method
    Patent number: 8203705
    Abstract: The invention is directed to detect a warp amount in a real-time manner in a wafer rotating at high speed under inspection.
    Type: Grant
    Filed: January 8, 2009
    Date of Patent: June 19, 2012
    Assignee: Hitachi-High Technologies Corporation
    Inventors: Masami Ooyama, Masayuki Hachiya, Rieko Hachiya, legal representative, Kimiko Hachiya, legal representative, Kazuhiro Zama, Keiichi Nagasaki