Patents by Inventor Kiminobu Akeno
Kiminobu Akeno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240136148Abstract: In one embodiment, a beam detector includes a first aperture plate including a first passage hole, a second aperture plate including a second passage hole that allows a single detection target beam passing through the first passage hole to pass therethrough, and a sensor detecting a beam current of the detection target beam passing through the second passage hole. The second aperture plate includes an electrically conductive material, a plurality of third passage holes are formed around the second passage hole, and the plurality of third passage holes allow light to pass therethrough.Type: ApplicationFiled: September 4, 2023Publication date: April 25, 2024Applicant: NuFlare Technology, Inc.Inventors: Yasutaka SATO, Hironori MIZOGUCHI, Toru HINATA, Toshiki KIMURA, Kiminobu AKENO
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Publication number: 20240071714Abstract: According to one embodiment, a beam detector includes a first aperture substrate including a first passage hole smaller than a pitch between beams of a multi charged particle beam, a second aperture substrate including a second passage hole allowing one detection target beam which has passed through the first passage hole, and a sensor detecting a beam current of the detection target beam which has passed through the second passage hole. The second aperture substrate has light permeability, and includes a conductive material.Type: ApplicationFiled: August 1, 2023Publication date: February 29, 2024Applicant: NuFlare Technology, Inc.Inventors: Yasutaka SATO, Kiminobu AKENO
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Patent number: 11266999Abstract: According to one embodiment, a dust-collecting apparatus includes a main body with a first surface on which a back surface of a first electrode is disposed; a fixing unit configured to control attachment and detachment of the first electrode and the main body; a second electrode configured to transfer a voltage to the first electrode; and a control board configured to control a magnitude and a timing of a voltage which is applied to the second electrode.Type: GrantFiled: November 1, 2018Date of Patent: March 8, 2022Assignee: NuFlare Technology, Inc.Inventors: Yosuke Takahashi, Yuji Abe, Kiminobu Akeno
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Patent number: 11049688Abstract: A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.Type: GrantFiled: September 27, 2019Date of Patent: June 29, 2021Assignee: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Keita Ideno, Kota Iwasaki, Keisuke Goto, Kiyoshi Nakaso, Shintaro Yamamoto, Hitoshi Matsushita, Ryota Inoue, Yuki Fukuda
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Publication number: 20200105499Abstract: A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.Type: ApplicationFiled: September 27, 2019Publication date: April 2, 2020Applicant: NuFlare Technology, Inc.Inventors: Michihiro KAWAGUCHI, Kiminobu AKENO, Keita IDENO, Kota IWASAKI, Keisuke GOTO, Kiyoshi NAKASO, Shintaro YAMAMOTO, Hitoshi MATSUSHITA, Ryota INOUE, Yuki FUKUDA
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Patent number: 10607810Abstract: The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.Type: GrantFiled: January 2, 2019Date of Patent: March 31, 2020Assignee: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Kiyoshi Nakaso, Keita Ideno, Shintaro Yamamoto, Keisuke Goto, Hitoshi Matsushita, Hirokazu Yoshioka, Ryouta Inoue, Yuuki Fukuda
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Patent number: 10373793Abstract: A conductive contact point pin includes a pin body, and a plurality of convex portions formed in a tip portion of the pin body, wherein the conductive contact point pin breaks, by pressing a substrate where a film to be broken is formed on a conductive film from above the film to be broken, the film to be broken in order to be electrically connected to the conductive film.Type: GrantFiled: August 28, 2017Date of Patent: August 6, 2019Assignee: NUFLARE TECHNOLOGY, INC.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Kenichi Kataoka, Tomoki Umetsu
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Publication number: 20190214224Abstract: The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.Type: ApplicationFiled: January 2, 2019Publication date: July 11, 2019Applicant: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Kiyoshi Nakaso, Keita Ideno, Shintaro Yamamoto, Keisuke Goto, Hitoshi Matsushita, Hirokazu Yoshioka, Ryouta Inoue, Yuuki Fukuda
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Publication number: 20190126290Abstract: According to one embodiment, a dust-collecting apparatus includes a main body with a first surface on which a back surface of a first electrode is disposed; a fixing unit configured to control attachment and detachment of the first electrode and the main body; a second electrode configured to transfer a voltage to the first electrode; and a control board configured to control a magnitude and a timing of a voltage which is applied to the second electrode.Type: ApplicationFiled: November 1, 2018Publication date: May 2, 2019Applicant: NuFlare Technology, Inc.Inventors: Yosuke TAKAHASHI, Yuji ABE, Kiminobu AKENO
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Publication number: 20180068824Abstract: A conductive contact point pin includes a pin body, and a plurality of convex portions formed in a tip portion of the pin body, wherein the conductive contact point pin breaks, by pressing a substrate where a film to be broken is formed on a conductive film from above the film to be broken, the film to be broken in order to be electrically connected to the conductive film.Type: ApplicationFiled: August 28, 2017Publication date: March 8, 2018Applicants: NUFLARE TECHNOLOGY, INC., KABUSHIKI KAISHA TOSHIBAInventors: Michihiro Kawaguchi, Kiminobu Akeno, Kenichi Kataoka, Tomoki Umetsu
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Patent number: 8987683Abstract: A charged particle beam drawing apparatus according to one embodiment of the present invention comprises a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum state, a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object, a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation and a temperature adjustment part for controlling a temperature of the temperature adjustment container, and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature.Type: GrantFiled: April 22, 2014Date of Patent: March 24, 2015Assignee: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kiminobu Akeno, Yoshinori Kagawa, Yu Asami, Keisuke Yamaguchi
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Publication number: 20140319373Abstract: A charged particle beam drawing apparatus according to one embodiment of the present invention comprises a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum state, a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object, a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation and a temperature adjustment part for controlling a temperature of the temperature adjustment container, and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature.Type: ApplicationFiled: April 22, 2014Publication date: October 30, 2014Applicant: Nuflare Technology, Inc.Inventors: Michihiro KAWAGUCHI, Kiminobu Akeno, Yoshinori Kagawa, Yu Asami, Keisuke Yamaguchi
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Patent number: 8847178Abstract: A charged particle beam writing apparatus according to one aspect of the present invention includes a substrate cover attachment/detachment unit to attach or detach a substrate cover that covers a whole periphery of a substrate being a writing target from an upper part, to/from the substrate, a writing unit to write a pattern on the substrate, in a state where the substrate cover is attached to the substrate, by a charged particle beam, a position measurement unit, before and after writing by the writing unit, to measure a position of the substrate cover in a state attached to the substrate, at a predetermined measurement position, and a correction unit, with respect to a position of the substrate to which the substrate cover is attached, to correct a positional deviation amount between a position of the substrate cover measured after writing and a position of the substrate cover measured before writing.Type: GrantFiled: September 24, 2012Date of Patent: September 30, 2014Assignee: NuFlare Technology, Inc.Inventors: Michihiro Kawaguchi, Kazuhiro Shiba, Keisuke Yamaguchi, Kiminobu Akeno, Yoshinori Kagawa
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Patent number: 8779397Abstract: A substrate cover 40 includes a conductive portion 41 having a shape corresponding to a peripheral edge region of a substrate. Since at least part of the conductive portion includes transmissive portions 47 each formed of a light transmissive member, it is configured so as to allow desired light to penetrate through. The position of each edge portion of the substrate is detected in such a manner that the substrate is disposed with the substrate cover 40 placed thereon between light irradiation means and a light detecting unit, irradiation light directed from the light irradiation means located above the substrate to the edge portion of the substrate is made to penetrate through at least part of the substrate cover 40, the edge portion of the substrate is then irradiated with light from the irradiation means.Type: GrantFiled: December 16, 2010Date of Patent: July 15, 2014Assignees: NuFlare Technology, Inc., Kabushiki Kaisha ToshibaInventors: Michihiro Kawaguchi, Keisuke Yamaguchi, Shun Kanezawa, Soichiro Mitsui, Kiminobu Akeno
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Publication number: 20110155930Abstract: A substrate cover 40 includes a conductive portion 41 having a shape corresponding to a peripheral edge region of a substrate. Since at least part of the conductive portion includes transmissive portions 47 each formed of a light transmissive member, it is configured so as to allow desired light to penetrate through. The position of each edge portion of the substrate is detected in such a manner that the substrate is disposed with the substrate cover 40 placed thereon between light irradiation means and a light detecting unit, irradiation light directed from the light irradiation means located above the substrate to the edge portion of the substrate is made to penetrate through at least part of the substrate cover 40, the edge portion of the substrate is then irradiated with light from the irradiation means.Type: ApplicationFiled: December 16, 2010Publication date: June 30, 2011Applicants: NuFlare Technology, Inc., Kabushiki Kaisha ToshibaInventors: Michihiro KAWAGUCHI, Keisuke Yamaguchi, Shun Kanezawa, Soichiro Mitsui, Kiminobu Akeno
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Patent number: 7528393Abstract: A charged particle beam processing apparatus includes a sample chamber to process a substrate including side faces by a charged particle beam, a movable stage in the sample chamber, the stage including a place on which the substrate is to be mounted, a height and position acquiring unit to acquire a height of the substrate on the stage by irradiating a laser beam onto the substrate on the stage and using the laser beam reflected from the substrate and to acquire positions of at least two adjacent side faces among the side faces based on the acquired height, and a calculating unit to calculate a position of center of gravity of the substrate on the stage and a rotation angle as to a rotary axis vertical to the place on which the substrate is to be mounted based on the positions of the at least two adjacent side faces.Type: GrantFiled: September 26, 2005Date of Patent: May 5, 2009Assignee: Kabushiki Kaisha ToshibaInventor: Kiminobu Akeno
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Patent number: 7075621Abstract: An alignment method for substrates includes preparing an alignment apparatus having a movement mechanism to move a target substrate in horizontal and vertical directions, a rotation mechanism to rotate the substrate in a horizontal plane, an illumination tool to irradiate the substrate, an image sensor to pick up an substrate image, an edge position sensor to sense the substrate edge positions, and a control computer, transferring the substrate from a previous stage using the moving mechanism, measuring the substrate position using the image sensor which picks up the image on a back surface of the substrate, while irradiating the substrate with the illumination tool from a sidewise direction, calculating positional shifts regarding X, Y, and ? of the mask, using the edge position sensor and control computer, correcting the positional shifts of the mask by the moving and rotation mechanisms, and transferring the substrate to a next stage.Type: GrantFiled: December 16, 2004Date of Patent: July 11, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Soichiro Mitsui, Toru Tojo, Kiminobu Akeno
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Publication number: 20060076514Abstract: A charged particle beam processing apparatus includes a sample chamber to process a substrate including side faces by a charged particle beam, a movable stage in the sample chamber, the stage including a place on which the substrate is to be mounted, a height and position acquiring unit to acquire a height of the substrate on the stage by irradiating a laser beam onto the substrate on the stage and using the laser beam reflected from the substrate and to acquire positions of at least two adjacent side faces among the side faces based on the acquired height, and a calculating unit to calculate a position of center of gravity of the substrate on the stage and a rotation angle as to a rotary axis vertical to the place on which the substrate is to be mounted based on the positions of the at least two adjacent side faces.Type: ApplicationFiled: September 26, 2005Publication date: April 13, 2006Inventor: Kiminobu Akeno
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Publication number: 20050128451Abstract: An alignment apparatus for substrates comprises a first movement mechanism moving a substrate to be treated in a horizontal direction, a second movement mechanism moving the substrate in a vertical direction, a rotation mechanism rotating the substrate in a substrate plane, an illumination tool irradiating the substrate from a sidewise direction in a state where the substrate is held in a desired height position by the second movement mechanism, an image sensor picking up an image on a back surface of the substrate in an irradiated state, an edge position sensor sensing plural edge positions of the substrate from an image obtained by the image sensor, and a control computer obtaining a positional shift of the substrate based on the edge positions sensed by the edge position sensor and correcting a positional shift of the horizontal and rotation directions by the first movement and rotation mechanisms.Type: ApplicationFiled: December 16, 2004Publication date: June 16, 2005Inventors: Soichiro Mitsui, Toru Tojo, Kiminobu Akeno
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Patent number: 6901314Abstract: An alignment apparatus for substrates comprises a first movement mechanism moving a substrate to be treated in a horizontal direction, a second movement mechanism moving the substrate in a vertical direction, a rotation mechanism rotating the substrate in a substrate plane, an illumination tool irradiating the substrate from a sidewise direction in a state where the substrate is held in a desired height position by the second movement mechanism, an image sensor picking up an image on a back surface of the substrate in an irradiated state, an edge position sensor sensing plural edge positions of the substrate from an image obtained by the image sensor, and a control computer obtaining a positional shift of the substrate based on the edge positions sensed by the edge position sensor and correcting a positional shift of the horizontal and rotation directions by the first movement and rotation mechanisms.Type: GrantFiled: March 27, 2003Date of Patent: May 31, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Soichiro Mitsui, Toru Tojo, Kiminobu Akeno