Abstract: A pulse wave detecting apparatus for detecting a pulse wave produced from an arterial vessel in a body portion of a subject, including a semiconductor substrate having a press surface at which the semiconductor substrate is adapted to be pressed against the body portion, the semiconductor substrate having a recess in a surface thereof opposite to the press surface and thereby including a diaphragm portion having a thin wall, and a pressure sensing device provided on the diaphragm portion, for converting a pressure transmitted from the arterial vessel to the diaphragm portion, into an electric signal.

Abstract: A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, including a semiconductor substrate including a thin portion obtained by locally forming a recess in one of opposite surfaces of the semiconductor substrate, at least one semiconductor pressure sensing element supported by the thin portion of the semiconductor substrate, for converting a pressure pulse wave transmitted from the arterial vessel to the thin portion, into an electric signal, and at least one semiconductor active element supported by the semiconductor substrate, for converting the electric signal into a different electric signal, the at least one active element including a portion of the semiconductor substrate.