Abstract: In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged particles strike a specimen, the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means for generating a first magnetic field is applied. Another means for generating a second magnetic field is provided to cancel the magnetic filed leaked from the first means for generating magnetic field at the position of the specimen.

Abstract: The semiconductor radiation detector has a low leakage current, high radiation detecting efficiency and low cost. A high-density impurity layer of the detector is formed at least on one surface of a semiconductor crystal wafer beforehand. A crystal of a size required for forming the detector is diced from the wafer and the diced surfaces of the crystal have a mirror finished surface. A passivation film is formed on the diced surfaces of the crystal immediately after polishing.

Abstract: In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged particles strike a specimen, the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means for generating a first magnetic field is applied. Another means for generating a second magnetic field is provided to cancel the magnetic filed leaked from the first means for generating magnetic field at the position of the specimen.

Abstract: A parallel radiation detector includes a plurality of radiation detecting elements, a plurality of preamplifiers for converting signals from the radiation detecting elements into voltage signals, a signal processing device for processing the voltage signals, a main control device for controlling the signal processing device to analyze the voltage signals, a display device for displaying analyzed results from the signal processing device, a storage device for storing signals, a plurality of a reset circuits corresponding to the plurality of preamplifiers, each reset circuit for generating a reset signal for returning the corresponding one of the preamplifiers to an initial state thereof when the voltage signal from the corresponding one of the preamplifiers reaches a predetermined voltage, and an inhibitor circuit for generating an inhibit signal for inhibiting the signal processing device from receiving and processing the voltage signals from the preamplifiers temporarily, based on the reset signal.

Abstract: An energy dispersive X-ray spectrometer used in combination with an electron microscope is disclosed, in which the energy of an electron beam of the electron microscope, with which a sample is irradiated, is determined exactly by detecting the disappearance point of the energy dispersive X-ray spectra on the high energy side, this energy of the irradiation electron beam thus determined being used as a parameter in a calculation for the quantitative energy dispersive X-ray analysis.

Abstract: A beam of, e.g. an electron microscope, is focussed on a specimen and secondary electrons generated thereby are detected and analyzed to generate an output signal. That output signal is investigated for one magnification or scanning time of the beam over a range of foci to determine the optimum output value for that one magnification. This investigation is repeated for other magnifications to generate a series of optimum output values. The optimum of that series is then determined, and the electron microscope may then be operated for that specimen at the focus corresponding to the optimum of the series of optimum values. In this way, automatic focussing is provided which permits the optimum focus to be determined in dependence on the specimen.

Abstract: An annular guide rail is detachably mounted in enclosing relation around a tubular member of piping to be probed for any flaws that might be present therein, and a flaw detecting unit, a circumferentially driving unit and an axially driving unit are movably arranged on the annular guide rail and interconnected by connecting means. The flaw detecting means includes an arm movable axially of the tubular member and supporting ultrasonic flaw detecting means. The circumferentially driving unit includes first driving means for moving the flaw detecting unit, circumferentially driving unit and axially driving unit circumferentially along the guide rail. The axially driving unit includes second driving means for moving the arm axially of the tubular member. A transmission mechanism is provided for transmitting the operation of the second driving means to the arm.

Abstract: A ultrasonic flaw detector driving apparatus including a driving apparatus which is equipped with an arm mounted respective side faces of a main frame of the ultrasonic flaw detector driving apparatus so as to allow the arms to move into an open and closed position. A resilient member provides a force which acts on the respective arms in such a direction so as to urge the arms into the open position. A ratchet prevents the arms from being opened by the resilient member as teeth engage with a pawl in a stepwise manner. Rollers are rotatably mounted to a tip of the respective arms and are in rolling contact with the guide rail on which the driving apparatus travels. The arms are moved to the open for mounting the driving apparatus to the guide rail and thereafter the arms are moved to the closed position. Thus, the main frame of the driving apparatus can be position movably fixed onto the guide rail.

Abstract: An apparatus is disclosed for facilitating adjustments of an image of a specimen obtained from an electron microscope and displayed on a cathode ray tube by displaying additionally and concurrently a wave form indicating information representative of contrast, focus, brightness or the like parameters of said image of the specimen. To this end, an electric specimen information signal is derived and applied alternatively to the Y-axis deflection coil and grid electrode of the display cathode ray tube (CRT) in response to a scanning line of the CRT in the direction of the X-axis thereof.