Patents by Inventor Kimiyoshi Deguchi

Kimiyoshi Deguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • X-ray exposure mask and fabrication method thereof
    Patent number: 5414746
    Abstract: An X-ray exposure mask comprises an X-ray transmission layer and an X-ray absorption layer formed on the X-ray transmission layer and being patterned. The X-ray absorption layer has a first region having a first thickness and a second region having a second thickness less than the first thickness.
    Type: Grant
    Filed: November 1, 1993
    Date of Patent: May 9, 1995
    Assignee: Nippon Telegraph & Telephone
    Inventors: Kimiyoshi Deguchi, Yoh Somemura, Kazunori Miyoshi, Tadahito Matsuda
  • Diffraction grating position adjuster using a grating and a reflector
    Patent number: 4656347
    Abstract: A method of adjusting a relative positional relationship between two objects uses a diffraction grating. A first diffraction grating is arranged on a first object located to oppose a second object, a reflecting surface is arranged at a position of the second object which corresponds to the first diffraction grating, and the method includes the step of irradiating the first diffraction grating with a radiation beam of coherent light or quasi-monochromatic light and measuring/setting the gap between the first and second objects in accordance with a change in intensity of one of the diffracted light components from the first diffraction grating.
    Type: Grant
    Filed: January 28, 1985
    Date of Patent: April 7, 1987
    Assignee: Nippon Telegraph & Telephone Public Corporation
    Inventors: Atsunobu Une, Makoto Iki, Nobuyuki Takeuchi, Kimiyoshi Deguchi